caa a22 4500 445362685 CHVBK 20180317142920.0 cr unu---uuuuu 170323e20110801xx s 000 0 eng 10.1007/s10832-009-9566-y doi (NATIONALLICENCE)springer-10.1007/s10832-009-9566-y Development of piezoelectric actuators for active X-ray optics [Elektronische Daten] [Dou Zhang, Daniel Rodriguez-Sanmartin, Tim Button, Carolyn Atkins, David Brooks, Peter Doel, Camelia Dunare, Charlotte Feldman, Ady James, Alan Michette, William Parkes, Slawka Pfauntsch, Shahin Sahraei, Tom Stevenson, Hongchang Wang, Richard Willingale] Piezoelectric actuators are widely utilised in adaptive optics to enable mirrors having an actively controlled reflective surface for the purpose of the wavefront correction by reducing the effects of rapidly changing optical distortion. Two new prototype adaptive X-ray optical systems are under development with the aim of approaching the fundamental diffraction limit. One proposed technology is microstructured optical arrays (MOAs) involving two or four piezoelectric strips bonded to a silicon wafer to produce a micro-focused X-ray source for biological applications, and which uses grazing incidence reflection through consecutive aligned arrays of channels obtained using deep silicon etching. Another technology is large scale optics which uses a thin shell mirror bonded with 20-40 piezoelectric actuators for the next generation of X-ray telescopes with an aim to achieve a resolution greater than that currently available by Chandra (0.5"). PZT-based piezoelectric actuators are being developed in this programme according to the design and implementation of the proposed mirror and array structures. Viscous plastic processing is chosen for the preparation of the materials system, which is subsequently formed and shaped into the suitable configurations. Precise controls on the thickness, surface finish and the curvature are the key factors to delivering satisfactory actuators. Unimorph type piezoelectric actuators have been proposed for the applications and results are presented regarding the fabrication and characterisation of such piezo-actuators, as well as the related design concepts and comparison to modelling work. Springer Science+Business Media, LLC, 2009 Piezoelectric nationallicence Actuator nationallicence X-ray optics nationallicence Zhang Dou School of Metallurgy and Materials, University of Birmingham, Edgbaston, B15 2TT, Birmingham, UK aut Rodriguez-Sanmartin Daniel School of Metallurgy and Materials, University of Birmingham, Edgbaston, B15 2TT, Birmingham, UK aut Button Tim School of Metallurgy and Materials, University of Birmingham, Edgbaston, B15 2TT, Birmingham, UK aut Atkins Carolyn Department of Physics and Astronomy, University College London, Gower Street, WC1E 6BT, London, UK aut Brooks David Department of Physics and Astronomy, University College London, Gower Street, WC1E 6BT, London, UK aut Doel Peter Department of Physics and Astronomy, University College London, Gower Street, WC1E 6BT, London, UK aut Dunare Camelia Scottish Microelectronics Centre, School of Engineering and Electronics, University of Edinburgh, West Mains Road, EH9 3JF, Edinburgh, UK aut Feldman Charlotte Department of Physics and Astronomy, University of Leicester, LE1 7RH, Leicester, UK aut James Ady Mullard Space Science Laboratory, University College London, Holmbury St. Mary, Dorking, RH5 6NT, Surrey, UK aut Michette Alan Department of Physics, King's College London, Strand, WC2R 2LS, London, UK aut Parkes William Scottish Microelectronics Centre, School of Engineering and Electronics, University of Edinburgh, West Mains Road, EH9 3JF, Edinburgh, UK aut Pfauntsch Slawka Department of Physics, King's College London, Strand, WC2R 2LS, London, UK aut Sahraei Shahin Department of Physics, King's College London, Strand, WC2R 2LS, London, UK aut Stevenson Tom Scottish Microelectronics Centre, School of Engineering and Electronics, University of Edinburgh, West Mains Road, EH9 3JF, Edinburgh, UK aut Wang Hongchang Department of Physics and Astronomy, University College London, Gower Street, WC1E 6BT, London, UK aut Willingale Richard Department of Physics and Astronomy, University of Leicester, LE1 7RH, Leicester, UK aut Journal of Electroceramics Springer US; http://www.springer-ny.com 27/1(2011-08-01), 1-6 1385-3449 27:1<1 2011 27 10832 https://doi.org/10.1007/s10832-009-9566-y text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10832-009-9566-y text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Zhang Dou School of Metallurgy and Materials, University of Birmingham, Edgbaston, B15 2TT, Birmingham, UK aut NATIONALLICENCE 700 1- Rodriguez-Sanmartin Daniel School of Metallurgy and Materials, University of Birmingham, Edgbaston, B15 2TT, Birmingham, UK aut NATIONALLICENCE 700 1- Button Tim School of Metallurgy and Materials, University of Birmingham, Edgbaston, B15 2TT, Birmingham, UK aut NATIONALLICENCE 700 1- Atkins Carolyn Department of Physics and Astronomy, University College London, Gower Street, WC1E 6BT, London, UK aut NATIONALLICENCE 700 1- Brooks David Department of Physics and Astronomy, University College London, Gower Street, WC1E 6BT, London, UK aut NATIONALLICENCE 700 1- Doel Peter Department of Physics and Astronomy, University College London, Gower Street, WC1E 6BT, London, UK aut NATIONALLICENCE 700 1- Dunare Camelia Scottish Microelectronics Centre, School of Engineering and Electronics, University of Edinburgh, West Mains Road, EH9 3JF, Edinburgh, UK aut NATIONALLICENCE 700 1- Feldman Charlotte Department of Physics and Astronomy, University of Leicester, LE1 7RH, Leicester, UK aut NATIONALLICENCE 700 1- James Ady Mullard Space Science Laboratory, University College London, Holmbury St. Mary, Dorking, RH5 6NT, Surrey, UK aut NATIONALLICENCE 700 1- Michette Alan Department of Physics, King's College London, Strand, WC2R 2LS, London, UK aut NATIONALLICENCE 700 1- Parkes William Scottish Microelectronics Centre, School of Engineering and Electronics, University of Edinburgh, West Mains Road, EH9 3JF, Edinburgh, UK aut NATIONALLICENCE 700 1- Pfauntsch Slawka Department of Physics, King's College London, Strand, WC2R 2LS, London, UK aut NATIONALLICENCE 700 1- Sahraei Shahin Department of Physics, King's College London, Strand, WC2R 2LS, London, UK aut NATIONALLICENCE 700 1- Stevenson Tom Scottish Microelectronics Centre, School of Engineering and Electronics, University of Edinburgh, West Mains Road, EH9 3JF, Edinburgh, UK aut NATIONALLICENCE 700 1- Wang Hongchang Department of Physics and Astronomy, University College London, Gower Street, WC1E 6BT, London, UK aut NATIONALLICENCE 700 1- Willingale Richard Department of Physics and Astronomy, University of Leicester, LE1 7RH, Leicester, UK aut NATIONALLICENCE 773 0- Journal of Electroceramics Springer US; http://www.springer-ny.com 27/1(2011-08-01), 1-6 1385-3449 27:1<1 2011 27 10832 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer