caa a22 4500 445362715 CHVBK 20180317142920.0 cr unu---uuuuu 170323e20110801xx s 000 0 eng 10.1007/s10832-010-9610-y doi (NATIONALLICENCE)springer-10.1007/s10832-010-9610-y High performance thin film PZT ultrasonic transducer by CSD for distance measurements in water [Elektronische Daten] [E. Heinonen, J. Juuti, J. Palosaari, F. Tyholdt, H. Jantunen, N. Østbø, A. Vogl, E. Poppe, S. Guðbjörnsson, E. Ringgaard, B. Hök, P.-E. Fägerman, P. Gløersen, H. Ræder] Piezoelectric thin film ultrasonic transducers were realised and tested for short range distance measurements. Displacements in air and water as a function of frequency were modelled by Comsol Multiphysics finite element modelling (FEM) and transducer configurations with a two electrode layout were manufactured to enable larger displacements than with the conventional design. The transducer was fabricated on a silicon wafer by chemical solution deposition (CSD) with total PZT (Pb(Zr0.53Ti0.47)O3) thickness of 2µm. Subsequently, a cavity underneath the PZT was wet etched creating a bending membrane with a total thickness of ∼13µm. The displacements of the transducers as a function of frequency were modelled and measured by fiber-optic laser vibrometer. The effective piezoelectric d33 coefficient of 300nm/V and 144nm/V in air and 48nm/V and 18nm/V in water was obtained for 260 × 260µm2 and 390 × 390µm2 membranes, respectively. The accuracy of the modelled resonance frequencies both in air and water was relatively good, of ∼4-13% and ∼5-20%, respectively. Springer Science+Business Media, LLC, 2010 Piezoelectric nationallicence Ultrasonic nationallicence Transducer nationallicence FEM nationallicence CSD nationallicence Heinonen E. Microelectronics and Materials Physics Laboratories, EMPART Research Group of Infotech, University of Oulu, P.O.Box4500, Fin-90014, Oulu, Finland aut Juuti J. Microelectronics and Materials Physics Laboratories, EMPART Research Group of Infotech, University of Oulu, P.O.Box4500, Fin-90014, Oulu, Finland aut Palosaari J. Microelectronics and Materials Physics Laboratories, EMPART Research Group of Infotech, University of Oulu, P.O.Box4500, Fin-90014, Oulu, Finland aut Tyholdt F. SINTEF, Blindern, P.O. Box124, NO-0349, Oslo, Norway aut Jantunen H. Microelectronics and Materials Physics Laboratories, EMPART Research Group of Infotech, University of Oulu, P.O.Box4500, Fin-90014, Oulu, Finland aut Østbø N. SINTEF, Blindern, P.O. Box124, NO-0349, Oslo, Norway aut Vogl A. SINTEF, Blindern, P.O. Box124, NO-0349, Oslo, Norway aut Poppe E. SINTEF, Blindern, P.O. Box124, NO-0349, Oslo, Norway aut Guðbjörnsson S. Star-Oddi Ltd, Vatnagardar 14, 104, Reykjavik, Iceland aut Ringgaard E. InSensor A/S, Hejreskovvej 18A, DK-3490, Kvistgård, Denmark aut Hök B. Hök Instrument AB, Flottiljgatan 49, SE-721 31, Västerås, Sweden aut Fägerman P.-E Mandalon Technologies AB, Westmansgatan 49, 582 16, Linköping, Sweden aut Gløersen P. Infineon Technologies SensoNor AS, Knudsrødveien 7, P.O. Box196, 3192, Horten, Norway aut Ræder H. Sonitor Technologies AS, Forskningsveien 1B, NO-0373, Oslo, Norway aut Journal of Electroceramics Springer US; http://www.springer-ny.com 27/1(2011-08-01), 24-28 1385-3449 27:1<24 2011 27 10832 https://doi.org/10.1007/s10832-010-9610-y text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10832-010-9610-y text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Heinonen E. Microelectronics and Materials Physics Laboratories, EMPART Research Group of Infotech, University of Oulu, P.O.Box4500, Fin-90014, Oulu, Finland aut NATIONALLICENCE 700 1- Juuti J. Microelectronics and Materials Physics Laboratories, EMPART Research Group of Infotech, University of Oulu, P.O.Box4500, Fin-90014, Oulu, Finland aut NATIONALLICENCE 700 1- Palosaari J. Microelectronics and Materials Physics Laboratories, EMPART Research Group of Infotech, University of Oulu, P.O.Box4500, Fin-90014, Oulu, Finland aut NATIONALLICENCE 700 1- Tyholdt F. SINTEF, Blindern, P.O. Box124, NO-0349, Oslo, Norway aut NATIONALLICENCE 700 1- Jantunen H. Microelectronics and Materials Physics Laboratories, EMPART Research Group of Infotech, University of Oulu, P.O.Box4500, Fin-90014, Oulu, Finland aut NATIONALLICENCE 700 1- Østbø N. SINTEF, Blindern, P.O. Box124, NO-0349, Oslo, Norway aut NATIONALLICENCE 700 1- Vogl A. SINTEF, Blindern, P.O. Box124, NO-0349, Oslo, Norway aut NATIONALLICENCE 700 1- Poppe E. SINTEF, Blindern, P.O. Box124, NO-0349, Oslo, Norway aut NATIONALLICENCE 700 1- Guðbjörnsson S. Star-Oddi Ltd, Vatnagardar 14, 104, Reykjavik, Iceland aut NATIONALLICENCE 700 1- Ringgaard E. InSensor A/S, Hejreskovvej 18A, DK-3490, Kvistgård, Denmark aut NATIONALLICENCE 700 1- Hök B. Hök Instrument AB, Flottiljgatan 49, SE-721 31, Västerås, Sweden aut NATIONALLICENCE 700 1- Fägerman P.-E Mandalon Technologies AB, Westmansgatan 49, 582 16, Linköping, Sweden aut NATIONALLICENCE 700 1- Gløersen P. Infineon Technologies SensoNor AS, Knudsrødveien 7, P.O. Box196, 3192, Horten, Norway aut NATIONALLICENCE 700 1- Ræder H. Sonitor Technologies AS, Forskningsveien 1B, NO-0373, Oslo, Norway aut NATIONALLICENCE 773 0- Journal of Electroceramics Springer US; http://www.springer-ny.com 27/1(2011-08-01), 24-28 1385-3449 27:1<24 2011 27 10832 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer