caa a22 4500 445362731 CHVBK 20180317142920.0 cr unu---uuuuu 170323e20110801xx s 000 0 eng 10.1007/s10832-011-9646-7 doi (NATIONALLICENCE)springer-10.1007/s10832-011-9646-7 Electrical and optical characterisation of aluminium nitride piezoelectric films on silicon nitride membranes [Elektronische Daten] [Didier Cornez, Jocelyn Elgoyhen, David Hutson, Cecile Percier, Perrine Plissard, Mark Begbie, Aboubacar Chaehoi, Katherine Kirk] Aluminium nitride (AlN) is a thin film piezoelectric material having excellent potential for integration with microelectronic systems. We have investigated flexural modes of Si3N4 membrane structures with and without an AlN active layer. AlN films typically 3μm thick were deposited by RF sputtering. Mechanical excitation was provided acoustically by sweeping the excitation frequency of a 1MHz air-coupled ultrasonic transducer. Mode shapes were verified by scanning laser vibrometry up to the [3,3] mode, in the frequency range 100kHz to 1MHz. Resonant frequencies were identified at the predicted values provided the tension in the layers could be estimated. For a membrane structure incorporating an AlN layer, acoustic and electrical excitation of flexural modes was confirmed by displacement measurements using laser vibrometry and resonant frequencies were compared with analytical calculations. Springer Science+Business Media, LLC, 2011 MEMS nationallicence Aluminium nitride nationallicence Flexural modes nationallicence Thin film piezoelectric nationallicence Cornez Didier Microscale Sensors, School of Engineering, University of the West of Scotland, PA1 2BE, Scotland, UK aut Elgoyhen Jocelyn Microscale Sensors, School of Engineering, University of the West of Scotland, PA1 2BE, Scotland, UK aut Hutson David Microscale Sensors, School of Engineering, University of the West of Scotland, PA1 2BE, Scotland, UK aut Percier Cecile Microscale Sensors, School of Engineering, University of the West of Scotland, PA1 2BE, Scotland, UK aut Plissard Perrine Microscale Sensors, School of Engineering, University of the West of Scotland, PA1 2BE, Scotland, UK aut Begbie Mark Institute for System Level Integration, Alba Centre, Alba Campus, EH54 7EG, Livingston, UK aut Chaehoi Aboubacar Institute for System Level Integration, Alba Centre, Alba Campus, EH54 7EG, Livingston, UK aut Kirk Katherine Microscale Sensors, School of Engineering, University of the West of Scotland, PA1 2BE, Scotland, UK aut Journal of Electroceramics Springer US; http://www.springer-ny.com 27/1(2011-08-01), 33-37 1385-3449 27:1<33 2011 27 10832 https://doi.org/10.1007/s10832-011-9646-7 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10832-011-9646-7 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Cornez Didier Microscale Sensors, School of Engineering, University of the West of Scotland, PA1 2BE, Scotland, UK aut NATIONALLICENCE 700 1- Elgoyhen Jocelyn Microscale Sensors, School of Engineering, University of the West of Scotland, PA1 2BE, Scotland, UK aut NATIONALLICENCE 700 1- Hutson David Microscale Sensors, School of Engineering, University of the West of Scotland, PA1 2BE, Scotland, UK aut NATIONALLICENCE 700 1- Percier Cecile Microscale Sensors, School of Engineering, University of the West of Scotland, PA1 2BE, Scotland, UK aut NATIONALLICENCE 700 1- Plissard Perrine Microscale Sensors, School of Engineering, University of the West of Scotland, PA1 2BE, Scotland, UK aut NATIONALLICENCE 700 1- Begbie Mark Institute for System Level Integration, Alba Centre, Alba Campus, EH54 7EG, Livingston, UK aut NATIONALLICENCE 700 1- Chaehoi Aboubacar Institute for System Level Integration, Alba Centre, Alba Campus, EH54 7EG, Livingston, UK aut NATIONALLICENCE 700 1- Kirk Katherine Microscale Sensors, School of Engineering, University of the West of Scotland, PA1 2BE, Scotland, UK aut NATIONALLICENCE 773 0- Journal of Electroceramics Springer US; http://www.springer-ny.com 27/1(2011-08-01), 33-37 1385-3449 27:1<33 2011 27 10832 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer