caa a22 4500 445362901 CHVBK 20180317142920.0 cr unu---uuuuu 170323e20110601xx s 000 0 eng 10.1007/s10832-010-9622-7 doi (NATIONALLICENCE)springer-10.1007/s10832-010-9622-7 Effect of preheating process on crystallization and optical properties of sol-gel derived ZnO semiconductor thin films [Elektronische Daten] [Chien-Yie Tsay, Kai-Shiung Fan, Chin-Yi Chen, Jyh-Ming Wu, Chien-Ming Lei] Highly transparent ZnO semiconductor thin films were deposited onto alkali-free glass substrates by a sol-gel spin coating process. This research investigated the effects of different preheating rates (4 or 10°C/min) on the various surface morphologies, crystallization characteristics, and optical properties of these thin films. The ZnO sol was synthesized by dissolving the zinc acetate dihydrate in isopropanol (IPA), and then adding monoethanolamine (MEA). These as-coated films were preheated at 300°C for 10min and annealed in an air ambiance at 500°C for 1h. Experimental results revealed that the as-prepared films had a hexagonal wurtzite structure, and that the heating rates of the preheating process obviously affected the surface morphologies, crystallization qualities, and transparency levels of the thin films. A ZnO thin film preheated at 10°C/min exhibited preferential orientation along the (002) plane, a flat surface, and also achieved a high transmittance value, 92.5%, for light with a wavelength of 550nm. Springer Science+Business Media, LLC, 2010 Transparent oxide semiconductor nationallicence ZnO thin films nationallicence Sol-gel method nationallicence Morphology nationallicence Optical properties nationallicence Tsay Chien-Yie Department of Materials Science and Engineering, Feng Chia University, No. 100, Wenhwa Rd. Seatwen, 407, Taichung, Taiwan, Republic of China aut Fan Kai-Shiung Department of Materials Science and Engineering, Feng Chia University, No. 100, Wenhwa Rd. Seatwen, 407, Taichung, Taiwan, Republic of China aut Chen Chin-Yi Department of Materials Science and Engineering, Feng Chia University, No. 100, Wenhwa Rd. Seatwen, 407, Taichung, Taiwan, Republic of China aut Wu Jyh-Ming Department of Materials Science and Engineering, Feng Chia University, No. 100, Wenhwa Rd. Seatwen, 407, Taichung, Taiwan, Republic of China aut Lei Chien-Ming Department of Chemical and Materials Engineering and Master Program of Nanomaterials, Chinese Culture University, No. 55, Hwa-Kang Road, Yang-Ming-Shan, 111, Taipei, Taiwan, Republic of China aut Journal of Electroceramics Springer US; http://www.springer-ny.com 26/1-4(2011-06-01), 23-27 1385-3449 26:1-4<23 2011 26 10832 https://doi.org/10.1007/s10832-010-9622-7 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10832-010-9622-7 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Tsay Chien-Yie Department of Materials Science and Engineering, Feng Chia University, No. 100, Wenhwa Rd. Seatwen, 407, Taichung, Taiwan, Republic of China aut NATIONALLICENCE 700 1- Fan Kai-Shiung Department of Materials Science and Engineering, Feng Chia University, No. 100, Wenhwa Rd. Seatwen, 407, Taichung, Taiwan, Republic of China aut NATIONALLICENCE 700 1- Chen Chin-Yi Department of Materials Science and Engineering, Feng Chia University, No. 100, Wenhwa Rd. Seatwen, 407, Taichung, Taiwan, Republic of China aut NATIONALLICENCE 700 1- Wu Jyh-Ming Department of Materials Science and Engineering, Feng Chia University, No. 100, Wenhwa Rd. Seatwen, 407, Taichung, Taiwan, Republic of China aut NATIONALLICENCE 700 1- Lei Chien-Ming Department of Chemical and Materials Engineering and Master Program of Nanomaterials, Chinese Culture University, No. 55, Hwa-Kang Road, Yang-Ming-Shan, 111, Taipei, Taiwan, Republic of China aut NATIONALLICENCE 773 0- Journal of Electroceramics Springer US; http://www.springer-ny.com 26/1-4(2011-06-01), 23-27 1385-3449 26:1-4<23 2011 26 10832 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer