caa a22 4500 445362936 CHVBK 20180317142920.0 cr unu---uuuuu 170323e20110601xx s 000 0 eng 10.1007/s10832-010-9621-8 doi (NATIONALLICENCE)springer-10.1007/s10832-010-9621-8 MEMS interdigitated electrode pattern optimization for a unimorph piezoelectric beam [Elektronische Daten] [Ryan Knight, Changki Mo, William Clark] This paper presents optimization of interdigitated (d 33) piezoelectric MEMS unimorph cantilever beams for harvesting vibration energy or for tuning resonators. The analysis of the poling behavior of the piezoelectric material is the key feature. While it is common that simplified models of interdigitated piezoelectric devices assume some uniform and well-defined poling pattern, the finite element modeling used in this work shows that not to be the case. A percent poling factor is developed to investigate the real losses associated with non-uniform poling. A parametric study in terms of electrode patterns, piezoelectric layer dimensions, and electrode dimensions is carried out to examine their effect on the percent poling factor. Design guidelines are provided to help ensure that such piezoelectric MEMS devices are developed to obtain optimum energy harvesting or tuning performance. Springer Science+Business Media, LLC, 2010 MEMS nationallicence Piezoelectric nationallicence Interdigitated nationallicence Electrode nationallicence Energy harvesting nationallicence Finite element analysis nationallicence Knight Ryan Mechanical Engineering and Materials Science Department, University of Pittsburgh, 15260, Pittsburgh, PA, USA aut Mo Changki School of Mechanical and Materials Engineering, Washington State University-Tri-Cities, 2710 Crimson Way, 99354, Richland, WA, USA aut Clark William Mechanical Engineering and Materials Science Department, University of Pittsburgh, 15260, Pittsburgh, PA, USA aut Journal of Electroceramics Springer US; http://www.springer-ny.com 26/1-4(2011-06-01), 14-22 1385-3449 26:1-4<14 2011 26 10832 https://doi.org/10.1007/s10832-010-9621-8 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10832-010-9621-8 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Knight Ryan Mechanical Engineering and Materials Science Department, University of Pittsburgh, 15260, Pittsburgh, PA, USA aut NATIONALLICENCE 700 1- Mo Changki School of Mechanical and Materials Engineering, Washington State University-Tri-Cities, 2710 Crimson Way, 99354, Richland, WA, USA aut NATIONALLICENCE 700 1- Clark William Mechanical Engineering and Materials Science Department, University of Pittsburgh, 15260, Pittsburgh, PA, USA aut NATIONALLICENCE 773 0- Journal of Electroceramics Springer US; http://www.springer-ny.com 26/1-4(2011-06-01), 14-22 1385-3449 26:1-4<14 2011 26 10832 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer