caa a22 4500 445363029 CHVBK 20180317142921.0 cr unu---uuuuu 170323e20110601xx s 000 0 eng 10.1007/s10832-011-9632-0 doi (NATIONALLICENCE)springer-10.1007/s10832-011-9632-0 Effects of rapid thermal annealing in different ambients on structural, electrical, and optical properties of ZnO thin films by sol-gel method [Elektronische Daten] [Jia Li, Jin-Hua Huang, Yu-Long Zhang, Ye Yang, Wei-Jie Song, Xiao-Min Li] We studied the effects of rapid thermal annealing in different ambients on the structural, electrical and optical properties of the sol-gel derived ZnO thin films. All the films after annealing showed highly degree of (002) oriented in the X-ray diffractometry (XRD) patterns. The effects of annealing ambients on electrical properties of the films were studied. Carrier concentration, resistivity and mobility were found to be distinguished after annealed in different ambients. The sample with the lowest resistivity of 0.095 Ω·cm and the largest mobility of 105.1cm2/v·s was achieved after annealing in vacuum. XPS results indicated that more oxygen vacancies existed on the ZnO surface when annealed in vacuum than that in O2. Springer Science+Business Media, LLC, 2011 ZnO thin films nationallicence Sol-gel nationallicence Rapid thermal annealing nationallicence Li Jia Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, 315201, Ningbo, People's Republic of China aut Huang Jin-Hua Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, 315201, Ningbo, People's Republic of China aut Zhang Yu-Long Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, 315201, Ningbo, People's Republic of China aut Yang Ye Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, 315201, Ningbo, People's Republic of China aut Song Wei-Jie Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, 315201, Ningbo, People's Republic of China aut Li Xiao-Min Shanghai Institute of Ceramics, Chinese Academy of Sciences, 200050, Shanghai, People's Republic of China aut Journal of Electroceramics Springer US; http://www.springer-ny.com 26/1-4(2011-06-01), 84-89 1385-3449 26:1-4<84 2011 26 10832 https://doi.org/10.1007/s10832-011-9632-0 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10832-011-9632-0 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Li Jia Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, 315201, Ningbo, People's Republic of China aut NATIONALLICENCE 700 1- Huang Jin-Hua Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, 315201, Ningbo, People's Republic of China aut NATIONALLICENCE 700 1- Zhang Yu-Long Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, 315201, Ningbo, People's Republic of China aut NATIONALLICENCE 700 1- Yang Ye Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, 315201, Ningbo, People's Republic of China aut NATIONALLICENCE 700 1- Song Wei-Jie Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, 315201, Ningbo, People's Republic of China aut NATIONALLICENCE 700 1- Li Xiao-Min Shanghai Institute of Ceramics, Chinese Academy of Sciences, 200050, Shanghai, People's Republic of China aut NATIONALLICENCE 773 0- Journal of Electroceramics Springer US; http://www.springer-ny.com 26/1-4(2011-06-01), 84-89 1385-3449 26:1-4<84 2011 26 10832 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer