caa a22 4500 445365943 CHVBK 20180317142930.0 cr unu---uuuuu 170323e20110301xx s 000 0 eng 10.1007/s10909-010-0257-5 doi (NATIONALLICENCE)springer-10.1007/s10909-010-0257-5 A Tunable Hybrid Electro-magnetomotive NEMS Device forLow Temperature Physics [Elektronische Daten] [E. Collin, T. Moutonet, J.-S. Heron, O. Bourgeois, Yu. Bunkov, H. Godfrin] Microfabrication techniques have made possible the realization of mechanical devices with dimensions in the micro- and nano-scale domain. At low temperatures, one can operate and study these devices in well-controlled conditions, namely low electrical noise and cryogenic vacuum, with the ability to use high magnetic fields and superconducting coating metals (Collin etal. in J. Low Temp. Phys. 150(5-6):739, 2008). Moreover, the temperature turns out to be a control parameter in the experimental study of mechanical dissipation processes, with the cryogenic environment ensuring that only low energy states are thermally populated. Immersed in a quantum fluid, these MEMS and NEMS devices (micro and nano electro-mechanical systems) can probe the excitations of the liquid at a smaller scale, with higher frequencies and better resolution than "classical” techniques (Triqueneaux et al. in Physica B 284:2141, 2000). We present experimental results obtained in vacuum on cantilever NEMS structures which can be both magnetomotive and electrostatically driven. The device is extremely sensitive with resolved displacements down to 1Å using conventional room-temperature electronics. It is calibrated insitu, and frequency/non-linearity can be tuned electrostatically. The design should allow parametric amplification to be used. Springer Science+Business Media, LLC, 2010 Mechanics nationallicence NEMS nationallicence Low temperatures nationallicence Non-linearity nationallicence Collin E. Institut Néel, CNRS et Université Joseph Fourier, BP 166, 38042, Grenoble Cedex 9, France aut Moutonet T. Institut Néel, CNRS et Université Joseph Fourier, BP 166, 38042, Grenoble Cedex 9, France aut Heron J.-S Institut Néel, CNRS et Université Joseph Fourier, BP 166, 38042, Grenoble Cedex 9, France aut Bourgeois O. Institut Néel, CNRS et Université Joseph Fourier, BP 166, 38042, Grenoble Cedex 9, France aut Bunkov Yu Institut Néel, CNRS et Université Joseph Fourier, BP 166, 38042, Grenoble Cedex 9, France aut Godfrin H. Institut Néel, CNRS et Université Joseph Fourier, BP 166, 38042, Grenoble Cedex 9, France aut Journal of Low Temperature Physics Springer US; http://www.springer-ny.com 162/5-6(2011-03-01), 653-660 0022-2291 162:5-6<653 2011 162 10909 https://doi.org/10.1007/s10909-010-0257-5 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10909-010-0257-5 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Collin E. Institut Néel, CNRS et Université Joseph Fourier, BP 166, 38042, Grenoble Cedex 9, France aut NATIONALLICENCE 700 1- Moutonet T. Institut Néel, CNRS et Université Joseph Fourier, BP 166, 38042, Grenoble Cedex 9, France aut NATIONALLICENCE 700 1- Heron J.-S Institut Néel, CNRS et Université Joseph Fourier, BP 166, 38042, Grenoble Cedex 9, France aut NATIONALLICENCE 700 1- Bourgeois O. Institut Néel, CNRS et Université Joseph Fourier, BP 166, 38042, Grenoble Cedex 9, France aut NATIONALLICENCE 700 1- Bunkov Yu Institut Néel, CNRS et Université Joseph Fourier, BP 166, 38042, Grenoble Cedex 9, France aut NATIONALLICENCE 700 1- Godfrin H. Institut Néel, CNRS et Université Joseph Fourier, BP 166, 38042, Grenoble Cedex 9, France aut NATIONALLICENCE 773 0- Journal of Low Temperature Physics Springer US; http://www.springer-ny.com 162/5-6(2011-03-01), 653-660 0022-2291 162:5-6<653 2011 162 10909 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer