caa a22 4500 445365994 CHVBK 20180317142930.0 cr unu---uuuuu 170323e20110301xx s 000 0 eng 10.1007/s10909-010-0247-7 doi (NATIONALLICENCE)springer-10.1007/s10909-010-0247-7 Characterization of MEMS Devices for the Study ofSuperfluid Helium Films [Elektronische Daten] [M. González, P. Bhupathi, B. Moon, P. Zheng, G. Ling, E. Garcell, H. Chan, Y. Lee] Measurements on the mechanical properties of MEMS resonators were performed to characterize such devices at room temperature and low temperatures. Using state-of-the-art silicon integrated circuit technology, we have designed, fabricated, and manufactured resonators consisting of a pair of parallel plates with a well-defined gap whose size can be controlled with a high accuracy down to the sub-micron range. Afull study of resonance properties at various pressures was performed at room temperature. We will discuss the details of design, fabrication, and operation. These studies open up a window of opportunities to look for novel phenomena in quantum fluids such as in superfluid 3He films. Springer Science+Business Media, LLC, 2010 Superfluid films nationallicence MEMS nationallicence Low-temperature devices nationallicence González M. Department of Physics, University of Florida, 32611, Gainesville, FL, USA aut Bhupathi P. Department of Physics, University of Florida, 32611, Gainesville, FL, USA aut Moon B. Department of Physics, University of Florida, 32611, Gainesville, FL, USA aut Zheng P. Department of Physics, University of Florida, 32611, Gainesville, FL, USA aut Ling G. Department of Physics, University of Florida, 32611, Gainesville, FL, USA aut Garcell E. Department of Physics, University of Florida, 32611, Gainesville, FL, USA aut Chan H. Department of Physics, University of Florida, 32611, Gainesville, FL, USA aut Lee Y. Department of Physics, University of Florida, 32611, Gainesville, FL, USA aut Journal of Low Temperature Physics Springer US; http://www.springer-ny.com 162/5-6(2011-03-01), 661-668 0022-2291 162:5-6<661 2011 162 10909 https://doi.org/10.1007/s10909-010-0247-7 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10909-010-0247-7 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- González M. Department of Physics, University of Florida, 32611, Gainesville, FL, USA aut NATIONALLICENCE 700 1- Bhupathi P. Department of Physics, University of Florida, 32611, Gainesville, FL, USA aut NATIONALLICENCE 700 1- Moon B. Department of Physics, University of Florida, 32611, Gainesville, FL, USA aut NATIONALLICENCE 700 1- Zheng P. Department of Physics, University of Florida, 32611, Gainesville, FL, USA aut NATIONALLICENCE 700 1- Ling G. Department of Physics, University of Florida, 32611, Gainesville, FL, USA aut NATIONALLICENCE 700 1- Garcell E. Department of Physics, University of Florida, 32611, Gainesville, FL, USA aut NATIONALLICENCE 700 1- Chan H. Department of Physics, University of Florida, 32611, Gainesville, FL, USA aut NATIONALLICENCE 700 1- Lee Y. Department of Physics, University of Florida, 32611, Gainesville, FL, USA aut NATIONALLICENCE 773 0- Journal of Low Temperature Physics Springer US; http://www.springer-ny.com 162/5-6(2011-03-01), 661-668 0022-2291 162:5-6<661 2011 162 10909 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer