caa a22 4500 445368241 CHVBK 20180317142937.0 cr unu---uuuuu 170323e20110601xx s 000 0 eng 10.1007/s00340-010-4229-x doi (NATIONALLICENCE)springer-10.1007/s00340-010-4229-x Nanofabrication by magnetic focusing of supersonic beams [Elektronische Daten] [R. Clark, T. Mazur, A. Libson, M. Raizen] We present a new method for nanoscale atom lithography. We propose the use of a supersonic atomic beam, which provides an extremely high brightness and cold source of fast atoms. The atoms are to be focused onto a substrate using a thin magnetic film, into which apertures with widths on the order of 100nm have been etched. Focused spot sizes near or below 10nm, with focal lengths on the order of 10μm, are predicted. Our method can be implemented in a highly parallel manner, enabling simultaneous fabrication of 106 identical elements, and it is applicable both to precision patterning of surfaces with metastable atomic beams and to direct deposition of material. Springer-Verlag, 2010 Clark R. Center for Nonlinear Dynamics and Department of Physics, The University of Texas at Austin, 78712, Austin, TX, USA aut Mazur T. Center for Nonlinear Dynamics and Department of Physics, The University of Texas at Austin, 78712, Austin, TX, USA aut Libson A. Center for Nonlinear Dynamics and Department of Physics, The University of Texas at Austin, 78712, Austin, TX, USA aut Raizen M. Center for Nonlinear Dynamics and Department of Physics, The University of Texas at Austin, 78712, Austin, TX, USA aut Applied Physics B Springer-Verlag 103/3(2011-06-01), 547-551 0946-2171 103:3<547 2011 103 340 https://doi.org/10.1007/s00340-010-4229-x text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00340-010-4229-x text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Clark R. Center for Nonlinear Dynamics and Department of Physics, The University of Texas at Austin, 78712, Austin, TX, USA aut NATIONALLICENCE 700 1- Mazur T. Center for Nonlinear Dynamics and Department of Physics, The University of Texas at Austin, 78712, Austin, TX, USA aut NATIONALLICENCE 700 1- Libson A. Center for Nonlinear Dynamics and Department of Physics, The University of Texas at Austin, 78712, Austin, TX, USA aut NATIONALLICENCE 700 1- Raizen M. Center for Nonlinear Dynamics and Department of Physics, The University of Texas at Austin, 78712, Austin, TX, USA aut NATIONALLICENCE 773 0- Applied Physics B Springer-Verlag 103/3(2011-06-01), 547-551 0946-2171 103:3<547 2011 103 340 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer