caa a22 4500 445368454 CHVBK 20180317142938.0 cr unu---uuuuu 170323e20110601xx s 000 0 eng 10.1007/s00340-011-4569-1 doi (NATIONALLICENCE)springer-10.1007/s00340-011-4569-1 Self-organized near-field etching of the sidewalls of glass corrugations [Elektronische Daten] [T. Yatsui, K. Hirata, Y. Tabata, Y. Miyake, Y. Akita, M. Yoshimoto, W. Nomura, T. Kawazoe, M. Naruse, M. Ohtsu] Using soda-lime glass with a nano-stripe pattern as a test specimen, we demonstrated self-organized near-field etching with a continuum-wave laser (λ=532 nm) light source. Atomic force microscopy confirmed that near-field etching decreases the flank roughness of the corrugations as well as the roughness of the flat surface. The Author(s), 2011 Yatsui T. School of Engineering, The University of Tokyo, Bunkyo-ku, 113-8656, Tokyo, Japan aut Hirata K. SIGMA KOKI Co., Ltd., 1-19-9 Midori, Sumida-ku, 130-0021, Tokyo, Japan aut Tabata Y. SIGMA KOKI Co., Ltd., 1-19-9 Midori, Sumida-ku, 130-0021, Tokyo, Japan aut Miyake Y. Department of Innovative and Engineered Materials, Tokyo Institute of Technology, 4259-J2-46 Nagatsuta, Midori-ku, Yokohama, 226-8503, Kanagawa, Japan aut Akita Y. Department of Innovative and Engineered Materials, Tokyo Institute of Technology, 4259-J2-46 Nagatsuta, Midori-ku, Yokohama, 226-8503, Kanagawa, Japan aut Yoshimoto M. Department of Innovative and Engineered Materials, Tokyo Institute of Technology, 4259-J2-46 Nagatsuta, Midori-ku, Yokohama, 226-8503, Kanagawa, Japan aut Nomura W. School of Engineering, The University of Tokyo, Bunkyo-ku, 113-8656, Tokyo, Japan aut Kawazoe T. School of Engineering, The University of Tokyo, Bunkyo-ku, 113-8656, Tokyo, Japan aut Naruse M. School of Engineering, The University of Tokyo, Bunkyo-ku, 113-8656, Tokyo, Japan aut Ohtsu M. School of Engineering, The University of Tokyo, Bunkyo-ku, 113-8656, Tokyo, Japan aut Applied Physics B Springer-Verlag 103/3(2011-06-01), 527-530 0946-2171 103:3<527 2011 103 340 https://doi.org/10.1007/s00340-011-4569-1 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00340-011-4569-1 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Yatsui T. School of Engineering, The University of Tokyo, Bunkyo-ku, 113-8656, Tokyo, Japan aut NATIONALLICENCE 700 1- Hirata K. SIGMA KOKI Co., Ltd., 1-19-9 Midori, Sumida-ku, 130-0021, Tokyo, Japan aut NATIONALLICENCE 700 1- Tabata Y. SIGMA KOKI Co., Ltd., 1-19-9 Midori, Sumida-ku, 130-0021, Tokyo, Japan aut NATIONALLICENCE 700 1- Miyake Y. Department of Innovative and Engineered Materials, Tokyo Institute of Technology, 4259-J2-46 Nagatsuta, Midori-ku, Yokohama, 226-8503, Kanagawa, Japan aut NATIONALLICENCE 700 1- Akita Y. Department of Innovative and Engineered Materials, Tokyo Institute of Technology, 4259-J2-46 Nagatsuta, Midori-ku, Yokohama, 226-8503, Kanagawa, Japan aut NATIONALLICENCE 700 1- Yoshimoto M. Department of Innovative and Engineered Materials, Tokyo Institute of Technology, 4259-J2-46 Nagatsuta, Midori-ku, Yokohama, 226-8503, Kanagawa, Japan aut NATIONALLICENCE 700 1- Nomura W. School of Engineering, The University of Tokyo, Bunkyo-ku, 113-8656, Tokyo, Japan aut NATIONALLICENCE 700 1- Kawazoe T. School of Engineering, The University of Tokyo, Bunkyo-ku, 113-8656, Tokyo, Japan aut NATIONALLICENCE 700 1- Naruse M. School of Engineering, The University of Tokyo, Bunkyo-ku, 113-8656, Tokyo, Japan aut NATIONALLICENCE 700 1- Ohtsu M. School of Engineering, The University of Tokyo, Bunkyo-ku, 113-8656, Tokyo, Japan aut NATIONALLICENCE 773 0- Applied Physics B Springer-Verlag 103/3(2011-06-01), 527-530 0946-2171 103:3<527 2011 103 340 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer