caa a22 4500 445368993 CHVBK 20180317142940.0 cr unu---uuuuu 170323e20110501xx s 000 0 eng 10.1007/s00340-010-4321-2 doi (NATIONALLICENCE)springer-10.1007/s00340-010-4321-2 Relative beam misalignment errors in high accuracy displacement interferometers: calculation and detection [Elektronische Daten] [G. D'Agostino, L. Robertsson] We consider the effects of misalignment in a two-beam interferometer resulting from lateral displacement as well as angular misalignment of the beams. Furthermore, a technique to determine such misalignments is discussed and examples of measurement strategies and expected performance are given. It is found that, when the waist of the beam used to illuminate the interferometer is larger than 0.7mm (∼1000λ), such an approach allows alignment to be made resulting in a relative interferometric error smaller than 1×10−10 provided that the diffraction effect is fully accounted for. Springer-Verlag, 2010 D'Agostino G. Division of Mechanics, Istituto Nazionale di Ricerca Metrologica (INRIM), Strada delle cacce 73, 10135, Torino, Italy aut Robertsson L. Time, Frequency and Gravimetry Department, Bureau International des Poids et Mesures (BIPM), Pavillon de Breteuil, 92312, Sèvres Cedex, France aut Applied Physics B Springer-Verlag 103/2(2011-05-01), 357-361 0946-2171 103:2<357 2011 103 340 https://doi.org/10.1007/s00340-010-4321-2 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00340-010-4321-2 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- D'Agostino G. Division of Mechanics, Istituto Nazionale di Ricerca Metrologica (INRIM), Strada delle cacce 73, 10135, Torino, Italy aut NATIONALLICENCE 700 1- Robertsson L. Time, Frequency and Gravimetry Department, Bureau International des Poids et Mesures (BIPM), Pavillon de Breteuil, 92312, Sèvres Cedex, France aut NATIONALLICENCE 773 0- Applied Physics B Springer-Verlag 103/2(2011-05-01), 357-361 0946-2171 103:2<357 2011 103 340 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer