caa a22 4500 445370653 CHVBK 20180317142945.0 cr unu---uuuuu 170323e20111101xx s 000 0 eng 10.1007/s00340-011-4598-9 doi (NATIONALLICENCE)springer-10.1007/s00340-011-4598-9 Synthesis of nanometric iron oxide films by RPLD and LCVD for thermo-photo sensors [Elektronische Daten] [S. Mulenko, N. Gorbachuk] Iron oxide films were deposited on <100> Si substrates by reactive pulsed laser deposition (RPLD) using a KrF laser (248nm). These films were deposited too by laser (light) chemical vapor deposition (LCVD) using continuous ultraviolet photodiode radiation (360nm). The deposited films demonstrated semiconducting properties. These films had large thermo-electromotive force (e.m.f.) coefficient (S) and high photosensitivity (F). For films deposited by RPLD the S coefficient varied in the range 0.8-1.65mV/K at 205-322K. This coefficient depended on the band gap (E g ) of the semiconductor films, which varied in the range 0.43-0.93eV. The largest F value found was 44Vc/W for white light at power density I≅0.006 W/cm2. Using LCVD, iron oxide films were deposited from iron carbonyl vapor. For these films, the S coefficient varied in the range −0.5 to 1.5mV/K at 110-330K. The S coefficient depended on E g of the semiconductor films, which varied in the range 0.44-0.51eV. The largest F value of these films was about 40Vc/W at the same I≅0.006W/cm2. Our results showed that RPLD and LCVD can be used to synthesize iron oxide thin films with variable stoichiometry and, consequently, with different values of E g . These films have large S coefficient and high photosensitivity F and therefore can be used as multi-parameter sensors: thermo-photo sensors. Springer-Verlag, 2011 Mulenko S. Institute for Metal Physics, NAS of Ukraine, 36, Academician Vernadsky Blvd., 03142, Kiev 142, Ukraine aut Gorbachuk N. Kiev State University of Technology and Design, 03011, Kiev 11, Ukraine aut Applied Physics B Springer-Verlag 105/3(2011-11-01), 517-523 0946-2171 105:3<517 2011 105 340 https://doi.org/10.1007/s00340-011-4598-9 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00340-011-4598-9 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Mulenko S. Institute for Metal Physics, NAS of Ukraine, 36, Academician Vernadsky Blvd., 03142, Kiev 142, Ukraine aut NATIONALLICENCE 700 1- Gorbachuk N. Kiev State University of Technology and Design, 03011, Kiev 11, Ukraine aut NATIONALLICENCE 773 0- Applied Physics B Springer-Verlag 105/3(2011-11-01), 517-523 0946-2171 105:3<517 2011 105 340 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer