caa a22 4500 445370688 CHVBK 20180317142945.0 cr unu---uuuuu 170323e20111101xx s 000 0 eng 10.1007/s00340-011-4625-x doi (NATIONALLICENCE)springer-10.1007/s00340-011-4625-x Fabrication of black multicrystalline silicon surface by nanosecond laser ablation [Elektronische Daten] [D. Zuev, O. Novodvorsky, E. Khaydukov, O. Khramova, A. Lotin, L. Parshina, V. Rocheva, V. Panchenko, V. Dvorkin, A. Poroykov, G. Untila, A. Chebotareva, T. Kost, M. Timofeyev] The optimal regimes for uniform texturing of a multicrystalline silicon (mc-Si) surface by pulsed laser radiation have been determined. The morphology and reflectance spectra of the texturized mc-Si have been studied. The laser-texturized mc-Si samples with reflectance of 2-3% over a wide spectral region have been produced. The influence of subsequent chemical etching on the reflective properties of the texturized surface has been analyzed. Springer-Verlag, 2011 Zuev D. Institute on Laser and Information Technologies, Russian Academy of Sciences (ILIT RAS), 1 Svyatoozerskaya St., 140700, Shatura, Moscow Region, Russia aut Novodvorsky O. Institute on Laser and Information Technologies, Russian Academy of Sciences (ILIT RAS), 1 Svyatoozerskaya St., 140700, Shatura, Moscow Region, Russia aut Khaydukov E. Institute on Laser and Information Technologies, Russian Academy of Sciences (ILIT RAS), 1 Svyatoozerskaya St., 140700, Shatura, Moscow Region, Russia aut Khramova O. Institute on Laser and Information Technologies, Russian Academy of Sciences (ILIT RAS), 1 Svyatoozerskaya St., 140700, Shatura, Moscow Region, Russia aut Lotin A. Institute on Laser and Information Technologies, Russian Academy of Sciences (ILIT RAS), 1 Svyatoozerskaya St., 140700, Shatura, Moscow Region, Russia aut Parshina L. Institute on Laser and Information Technologies, Russian Academy of Sciences (ILIT RAS), 1 Svyatoozerskaya St., 140700, Shatura, Moscow Region, Russia aut Rocheva V. Institute on Laser and Information Technologies, Russian Academy of Sciences (ILIT RAS), 1 Svyatoozerskaya St., 140700, Shatura, Moscow Region, Russia aut Panchenko V. Institute on Laser and Information Technologies, Russian Academy of Sciences (ILIT RAS), 1 Svyatoozerskaya St., 140700, Shatura, Moscow Region, Russia aut Dvorkin V. Skobeltsyn Institute of Nuclear Physics (MSU SINP), Lomonosov Moscow State University, 1(2), Leninskie gory, GSP-1, 119991, Moscow, Russia aut Poroykov A. Skobeltsyn Institute of Nuclear Physics (MSU SINP), Lomonosov Moscow State University, 1(2), Leninskie gory, GSP-1, 119991, Moscow, Russia aut Untila G. Skobeltsyn Institute of Nuclear Physics (MSU SINP), Lomonosov Moscow State University, 1(2), Leninskie gory, GSP-1, 119991, Moscow, Russia aut Chebotareva A. Skobeltsyn Institute of Nuclear Physics (MSU SINP), Lomonosov Moscow State University, 1(2), Leninskie gory, GSP-1, 119991, Moscow, Russia aut Kost T. Skobeltsyn Institute of Nuclear Physics (MSU SINP), Lomonosov Moscow State University, 1(2), Leninskie gory, GSP-1, 119991, Moscow, Russia aut Timofeyev M. Skobeltsyn Institute of Nuclear Physics (MSU SINP), Lomonosov Moscow State University, 1(2), Leninskie gory, GSP-1, 119991, Moscow, Russia aut Applied Physics B Springer-Verlag 105/3(2011-11-01), 545-550 0946-2171 105:3<545 2011 105 340 https://doi.org/10.1007/s00340-011-4625-x text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00340-011-4625-x text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Zuev D. Institute on Laser and Information Technologies, Russian Academy of Sciences (ILIT RAS), 1 Svyatoozerskaya St., 140700, Shatura, Moscow Region, Russia aut NATIONALLICENCE 700 1- Novodvorsky O. Institute on Laser and Information Technologies, Russian Academy of Sciences (ILIT RAS), 1 Svyatoozerskaya St., 140700, Shatura, Moscow Region, Russia aut NATIONALLICENCE 700 1- Khaydukov E. Institute on Laser and Information Technologies, Russian Academy of Sciences (ILIT RAS), 1 Svyatoozerskaya St., 140700, Shatura, Moscow Region, Russia aut NATIONALLICENCE 700 1- Khramova O. Institute on Laser and Information Technologies, Russian Academy of Sciences (ILIT RAS), 1 Svyatoozerskaya St., 140700, Shatura, Moscow Region, Russia aut NATIONALLICENCE 700 1- Lotin A. Institute on Laser and Information Technologies, Russian Academy of Sciences (ILIT RAS), 1 Svyatoozerskaya St., 140700, Shatura, Moscow Region, Russia aut NATIONALLICENCE 700 1- Parshina L. Institute on Laser and Information Technologies, Russian Academy of Sciences (ILIT RAS), 1 Svyatoozerskaya St., 140700, Shatura, Moscow Region, Russia aut NATIONALLICENCE 700 1- Rocheva V. Institute on Laser and Information Technologies, Russian Academy of Sciences (ILIT RAS), 1 Svyatoozerskaya St., 140700, Shatura, Moscow Region, Russia aut NATIONALLICENCE 700 1- Panchenko V. Institute on Laser and Information Technologies, Russian Academy of Sciences (ILIT RAS), 1 Svyatoozerskaya St., 140700, Shatura, Moscow Region, Russia aut NATIONALLICENCE 700 1- Dvorkin V. Skobeltsyn Institute of Nuclear Physics (MSU SINP), Lomonosov Moscow State University, 1(2), Leninskie gory, GSP-1, 119991, Moscow, Russia aut NATIONALLICENCE 700 1- Poroykov A. Skobeltsyn Institute of Nuclear Physics (MSU SINP), Lomonosov Moscow State University, 1(2), Leninskie gory, GSP-1, 119991, Moscow, Russia aut NATIONALLICENCE 700 1- Untila G. Skobeltsyn Institute of Nuclear Physics (MSU SINP), Lomonosov Moscow State University, 1(2), Leninskie gory, GSP-1, 119991, Moscow, Russia aut NATIONALLICENCE 700 1- Chebotareva A. Skobeltsyn Institute of Nuclear Physics (MSU SINP), Lomonosov Moscow State University, 1(2), Leninskie gory, GSP-1, 119991, Moscow, Russia aut NATIONALLICENCE 700 1- Kost T. Skobeltsyn Institute of Nuclear Physics (MSU SINP), Lomonosov Moscow State University, 1(2), Leninskie gory, GSP-1, 119991, Moscow, Russia aut NATIONALLICENCE 700 1- Timofeyev M. Skobeltsyn Institute of Nuclear Physics (MSU SINP), Lomonosov Moscow State University, 1(2), Leninskie gory, GSP-1, 119991, Moscow, Russia aut NATIONALLICENCE 773 0- Applied Physics B Springer-Verlag 105/3(2011-11-01), 545-550 0946-2171 105:3<545 2011 105 340 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer