caa a22 4500 445370742 CHVBK 20180317142945.0 cr unu---uuuuu 170323e20111101xx s 000 0 eng 10.1007/s00340-011-4505-4 doi (NATIONALLICENCE)springer-10.1007/s00340-011-4505-4 Chemical and structural modifications of laser treated WTi surfaces at different ambient conditions [Elektronische Daten] [S. Petrović, D. Peruško, D. Milovanović, Z. Siketić, M. Jakšić, J. Kovač, B. Gaković, M. Milosavljević, M. Trtica] In this work we have studied the influence of laser modification on the composition and structure of tungsten titanium (WTi) thin films, deposited on n-type (100) silicon wafers. After deposition, the samples were multi-pulse laser irradiated in a nitrogen, oxygen, and helium ambient. The composition of the WTi/Si sample was determined by Elastic Recoil Detection Analysis (ERDA). Surface morphology was monitored by Atomic Force Microscopy (AFM). In the experiment, typical laser output parameters were: wavelength 1064nm, pulse duration 150 ps, and laser pulse energy 30 mJ. Surface concentrations of W and Ti, as well as the concentration of gas components nitrogen and oxygen were determinated before and after the action of laser radiation in different ambient conditions. The contents of W and Ti decreased after irradiation due to adsorbed gases from the surrounding atmosphere. After surface irradiation in the inert ambient (He), the concentrations of the components were not significantly changed. In other cases, oxygen was the dominant component at the surface, probably due to the high affinity of thin film components. Also, the morphological changes occurred at the surface of WTi, as an increase in the surface roughness and formation of the granular structures are a result of laser-induced surface oxidation and recrystallization. Springer-Verlag, 2011 Petrović S. Vinča Institute of Nuclear Sciences, University of Belgrade, P.O. Box 522, 11001, Belgrade, Serbia aut Peruško D. Vinča Institute of Nuclear Sciences, University of Belgrade, P.O. Box 522, 11001, Belgrade, Serbia aut Milovanović D. Vinča Institute of Nuclear Sciences, University of Belgrade, P.O. Box 522, 11001, Belgrade, Serbia aut Siketić Z. Ruđer Bošković Institute, P.O. Box 180, 10002, Zagreb, Croatia aut Jakšić M. Ruđer Bošković Institute, P.O. Box 180, 10002, Zagreb, Croatia aut Kovač J. Jožef Stefan Institute, Jamova 39, 1000, Ljubljana, Slovenia aut Gaković B. Vinča Institute of Nuclear Sciences, University of Belgrade, P.O. Box 522, 11001, Belgrade, Serbia aut Milosavljević M. Vinča Institute of Nuclear Sciences, University of Belgrade, P.O. Box 522, 11001, Belgrade, Serbia aut Trtica M. Vinča Institute of Nuclear Sciences, University of Belgrade, P.O. Box 522, 11001, Belgrade, Serbia aut Applied Physics B Springer-Verlag 105/3(2011-11-01), 593-597 0946-2171 105:3<593 2011 105 340 https://doi.org/10.1007/s00340-011-4505-4 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00340-011-4505-4 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Petrović S. Vinča Institute of Nuclear Sciences, University of Belgrade, P.O. Box 522, 11001, Belgrade, Serbia aut NATIONALLICENCE 700 1- Peruško D. Vinča Institute of Nuclear Sciences, University of Belgrade, P.O. Box 522, 11001, Belgrade, Serbia aut NATIONALLICENCE 700 1- Milovanović D. Vinča Institute of Nuclear Sciences, University of Belgrade, P.O. Box 522, 11001, Belgrade, Serbia aut NATIONALLICENCE 700 1- Siketić Z. Ruđer Bošković Institute, P.O. Box 180, 10002, Zagreb, Croatia aut NATIONALLICENCE 700 1- Jakšić M. Ruđer Bošković Institute, P.O. Box 180, 10002, Zagreb, Croatia aut NATIONALLICENCE 700 1- Kovač J. Jožef Stefan Institute, Jamova 39, 1000, Ljubljana, Slovenia aut NATIONALLICENCE 700 1- Gaković B. Vinča Institute of Nuclear Sciences, University of Belgrade, P.O. Box 522, 11001, Belgrade, Serbia aut NATIONALLICENCE 700 1- Milosavljević M. Vinča Institute of Nuclear Sciences, University of Belgrade, P.O. Box 522, 11001, Belgrade, Serbia aut NATIONALLICENCE 700 1- Trtica M. Vinča Institute of Nuclear Sciences, University of Belgrade, P.O. Box 522, 11001, Belgrade, Serbia aut NATIONALLICENCE 773 0- Applied Physics B Springer-Verlag 105/3(2011-11-01), 593-597 0946-2171 105:3<593 2011 105 340 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer