caa a22 4500 445370750 CHVBK 20180317142945.0 cr unu---uuuuu 170323e20111101xx s 000 0 eng 10.1007/s00340-011-4699-5 doi (NATIONALLICENCE)springer-10.1007/s00340-011-4699-5 Ultra-high resolution optical coherence tomography for encapsulation quality inspection [Elektronische Daten] [J. Czajkowski, T. Fabritius, J. Ulański, T. Marszałek, M. Gazicki-Lipman, A. Nosal, R. Śliż, E. Alarousu, T. Prykäri, R. Myllylä, G. Jabbour] We present the application of ultra-high resolution optical coherence tomography (UHR-OCT) in evaluation of thin, protective films used in printed electronics. Two types of sample were investigated: microscopy glass and organic field effect transistor (OFET) structure. Samples were coated with thin (1-3μm) layer of parylene C polymer. Measurements were done using experimental UHR-OCT device based on a Kerr-lens mode locked Ti:sapphire femtosecond laser, photonic crystal fibre and modified, free-space Michelson interferometer. Sub-micron resolution offered by the UHR-OCT system applied in the study enables registration of both interfaces of the thin encapsulation layer. Complete, volumetric characterisation of protective layers is presented, demonstrating possibility to use OCT for encapsulation quality inspection. Springer-Verlag, 2011 Czajkowski J. Optoelectronics and Measurement Techniques Laboratory, University of Oulu, P.O. Box 4500, 90014, Oulu, Finland aut Fabritius T. Optoelectronics and Measurement Techniques Laboratory, University of Oulu, P.O. Box 4500, 90014, Oulu, Finland aut Ulański J. Department of Molecular Physics, Technical University of Łódź, 90-924, Łódź, Poland aut Marszałek T. Department of Molecular Physics, Technical University of Łódź, 90-924, Łódź, Poland aut Gazicki-Lipman M. Institute of Mechanical Engineering, Technical University of Łódź, 90-924, Łódź, Poland aut Nosal A. Institute of Mechanical Engineering, Technical University of Łódź, 90-924, Łódź, Poland aut Śliż R. Optoelectronics and Measurement Techniques Laboratory, University of Oulu, P.O. Box 4500, 90014, Oulu, Finland aut Alarousu E. Solar and Photovoltaics Engineering Research Center, King Abdullah University of Science and Technology, 23955-6900, Thuwal, Jeddah, Saudi Arabia aut Prykäri T. Optoelectronics and Measurement Techniques Laboratory, University of Oulu, P.O. Box 4500, 90014, Oulu, Finland aut Myllylä R. Optoelectronics and Measurement Techniques Laboratory, University of Oulu, P.O. Box 4500, 90014, Oulu, Finland aut Jabbour G. Optoelectronics and Measurement Techniques Laboratory, University of Oulu, P.O. Box 4500, 90014, Oulu, Finland aut Applied Physics B Springer-Verlag 105/3(2011-11-01), 649-657 0946-2171 105:3<649 2011 105 340 https://doi.org/10.1007/s00340-011-4699-5 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00340-011-4699-5 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Czajkowski J. Optoelectronics and Measurement Techniques Laboratory, University of Oulu, P.O. Box 4500, 90014, Oulu, Finland aut NATIONALLICENCE 700 1- Fabritius T. Optoelectronics and Measurement Techniques Laboratory, University of Oulu, P.O. Box 4500, 90014, Oulu, Finland aut NATIONALLICENCE 700 1- Ulański J. Department of Molecular Physics, Technical University of Łódź, 90-924, Łódź, Poland aut NATIONALLICENCE 700 1- Marszałek T. Department of Molecular Physics, Technical University of Łódź, 90-924, Łódź, Poland aut NATIONALLICENCE 700 1- Gazicki-Lipman M. Institute of Mechanical Engineering, Technical University of Łódź, 90-924, Łódź, Poland aut NATIONALLICENCE 700 1- Nosal A. Institute of Mechanical Engineering, Technical University of Łódź, 90-924, Łódź, Poland aut NATIONALLICENCE 700 1- Śliż R. Optoelectronics and Measurement Techniques Laboratory, University of Oulu, P.O. Box 4500, 90014, Oulu, Finland aut NATIONALLICENCE 700 1- Alarousu E. Solar and Photovoltaics Engineering Research Center, King Abdullah University of Science and Technology, 23955-6900, Thuwal, Jeddah, Saudi Arabia aut NATIONALLICENCE 700 1- Prykäri T. Optoelectronics and Measurement Techniques Laboratory, University of Oulu, P.O. Box 4500, 90014, Oulu, Finland aut NATIONALLICENCE 700 1- Myllylä R. Optoelectronics and Measurement Techniques Laboratory, University of Oulu, P.O. Box 4500, 90014, Oulu, Finland aut NATIONALLICENCE 700 1- Jabbour G. Optoelectronics and Measurement Techniques Laboratory, University of Oulu, P.O. Box 4500, 90014, Oulu, Finland aut NATIONALLICENCE 773 0- Applied Physics B Springer-Verlag 105/3(2011-11-01), 649-657 0946-2171 105:3<649 2011 105 340 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer