caa a22 4500 445370998 CHVBK 20180317142946.0 cr unu---uuuuu 170323e20111201xx s 000 0 eng 10.1007/s00340-011-4794-7 doi (NATIONALLICENCE)springer-10.1007/s00340-011-4794-7 Performance analysis of coherent optical scatterometry [Elektronische Daten] [O. El Gawhary, N. Kumar, S. Pereira, W. Coene, H. Urbach] Scatterometry is a well established technique currently utilized in research, as well as in industrial applications, to retrieve the properties of a given scatterer (the target) by looking at how the light coming from a certain source is diffracted in the far field. Currently the light source is often a discharge lamp that, after wavelength filtering, can be thought as a quasi-monochromatic, but spatially incoherent, source. In the present work, benefits of using a focused spot from a spatially coherent light source, as that emitted by a laser, are investigated on a theoretical viewpoint. The focused spot is scanned over the object of interest and, for each scan position, a far-field diffraction pattern is recorded. Our results show that spatially coherent light can sensibly increase the accuracy of the technique with respect to the target's geometrical profile. The Author(s), 2011 El Gawhary O. Optics Research Group, Department of Imaging Science and Technology, Delft University of Technology, P.O. Box 5046, 2600 GA, Delft, The Netherlands aut Kumar N. Optics Research Group, Department of Imaging Science and Technology, Delft University of Technology, P.O. Box 5046, 2600 GA, Delft, The Netherlands aut Pereira S. Optics Research Group, Department of Imaging Science and Technology, Delft University of Technology, P.O. Box 5046, 2600 GA, Delft, The Netherlands aut Coene W. ASML Netherlands B.V., De Run 6501, 5504 DR, Veldhoven, The Netherlands aut Urbach H. Optics Research Group, Department of Imaging Science and Technology, Delft University of Technology, P.O. Box 5046, 2600 GA, Delft, The Netherlands aut Applied Physics B Springer-Verlag 105/4(2011-12-01), 775-781 0946-2171 105:4<775 2011 105 340 https://doi.org/10.1007/s00340-011-4794-7 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00340-011-4794-7 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- El Gawhary O. Optics Research Group, Department of Imaging Science and Technology, Delft University of Technology, P.O. Box 5046, 2600 GA, Delft, The Netherlands aut NATIONALLICENCE 700 1- Kumar N. Optics Research Group, Department of Imaging Science and Technology, Delft University of Technology, P.O. Box 5046, 2600 GA, Delft, The Netherlands aut NATIONALLICENCE 700 1- Pereira S. Optics Research Group, Department of Imaging Science and Technology, Delft University of Technology, P.O. Box 5046, 2600 GA, Delft, The Netherlands aut NATIONALLICENCE 700 1- Coene W. ASML Netherlands B.V., De Run 6501, 5504 DR, Veldhoven, The Netherlands aut NATIONALLICENCE 700 1- Urbach H. Optics Research Group, Department of Imaging Science and Technology, Delft University of Technology, P.O. Box 5046, 2600 GA, Delft, The Netherlands aut NATIONALLICENCE 773 0- Applied Physics B Springer-Verlag 105/4(2011-12-01), 775-781 0946-2171 105:4<775 2011 105 340 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer