caa a22 4500 445371110 CHVBK 20180317142947.0 cr unu---uuuuu 170323e20111201xx s 000 0 eng 10.1007/s00340-011-4743-5 doi (NATIONALLICENCE)springer-10.1007/s00340-011-4743-5 Structure formation in atom lithography using geometric collimation [Elektronische Daten] [T. Meijer, J. Beardmore, C. Fabrie, J. van Lieshout, R. Notermans, R. Sang, E. Vredenbregt, K. van Leeuwen] Atom lithography uses standing wave light fields as arrays of lenses to focus neutral atom beams into line patterns on a substrate. Laser cooled atom beams are commonly used, but an atom beam source with a small opening placed at a large distance from a substrate creates atom beams which are locally geometrically collimated on the substrate. These beams have local offset angles with respect to the substrate. We show that this affects the height, width, shape, and position of the created structures. We find that simulated effects are partially obscured in experiments by substrate-dependent diffusion of atoms, while scattering and interference just above the substrate limit the quality of the standing wave lens. We find that in atom lithography without laser cooling the atom beam source geometry is imaged onto the substrate by the standing wave lens. We therefore propose using structured atom beam sources to image more complex patterns on subwavelength scales in a massively parallel way. The Author(s), 2011 Meijer T. Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands aut Beardmore J. Centre for Quantum Dynamics, Griffith University, 4111, Nathan, Queensland, Australia aut Fabrie C. Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands aut van Lieshout J. Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands aut Notermans R. Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands aut Sang R. Centre for Quantum Dynamics, Griffith University, 4111, Nathan, Queensland, Australia aut Vredenbregt E. Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands aut van Leeuwen K. Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands aut Applied Physics B Springer-Verlag 105/4(2011-12-01), 703-713 0946-2171 105:4<703 2011 105 340 https://doi.org/10.1007/s00340-011-4743-5 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00340-011-4743-5 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Meijer T. Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands aut NATIONALLICENCE 700 1- Beardmore J. Centre for Quantum Dynamics, Griffith University, 4111, Nathan, Queensland, Australia aut NATIONALLICENCE 700 1- Fabrie C. Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands aut NATIONALLICENCE 700 1- van Lieshout J. Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands aut NATIONALLICENCE 700 1- Notermans R. Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands aut NATIONALLICENCE 700 1- Sang R. Centre for Quantum Dynamics, Griffith University, 4111, Nathan, Queensland, Australia aut NATIONALLICENCE 700 1- Vredenbregt E. Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands aut NATIONALLICENCE 700 1- van Leeuwen K. Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands aut NATIONALLICENCE 773 0- Applied Physics B Springer-Verlag 105/4(2011-12-01), 703-713 0946-2171 105:4<703 2011 105 340 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer