caa a22 4500 445371153 CHVBK 20180317142947.0 cr unu---uuuuu 170323e20111201xx s 000 0 eng 10.1007/s00340-011-4712-z doi (NATIONALLICENCE)springer-10.1007/s00340-011-4712-z Verification of evanescent coupling from subwavelength grating pairs [Elektronische Daten] [A.-A. Rogers, S. Kedia, S. Samson, S. Bhansali] Near-field evanescent wave coupling of various subwavelength grating pairs, using a 1.55 μm infrared semiconductor laser has been demonstrated for use as an optical MEMS sensor. Subwavelength grating pairs were fabricated on both glass and silicon substrates. When coupled together the effective grating period is not subwavelength and can exhibit several diffraction orders. The 1.55 μm infrared source was incident on the coupled pairs and the first-order output intensity was recorded and compared with the output intensity from simulated results. This demonstrated evanescent wave coupling concept can be applied to MEMS systems with nanometer gap separations (e.g., pressure sensors, biosensors, and accelerometers) to allow for subnanometer displacement detection. Springer-Verlag, 2011 Rogers A.-A Department of Electrical Engineering, University of South Florida, 4202 E. Fowler Ave, 33620, Tampa, FL, USA aut Kedia S. SRI International, 7935 114th Avenue, 33773, Largo, FL, USA aut Samson S. SRI International, 7935 114th Avenue, 33773, Largo, FL, USA aut Bhansali S. Department of Electrical Engineering, University of South Florida, 4202 E. Fowler Ave, 33620, Tampa, FL, USA aut Applied Physics B Springer-Verlag 105/4(2011-12-01), 833-837 0946-2171 105:4<833 2011 105 340 https://doi.org/10.1007/s00340-011-4712-z text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00340-011-4712-z text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Rogers A.-A Department of Electrical Engineering, University of South Florida, 4202 E. Fowler Ave, 33620, Tampa, FL, USA aut NATIONALLICENCE 700 1- Kedia S. SRI International, 7935 114th Avenue, 33773, Largo, FL, USA aut NATIONALLICENCE 700 1- Samson S. SRI International, 7935 114th Avenue, 33773, Largo, FL, USA aut NATIONALLICENCE 700 1- Bhansali S. Department of Electrical Engineering, University of South Florida, 4202 E. Fowler Ave, 33620, Tampa, FL, USA aut NATIONALLICENCE 773 0- Applied Physics B Springer-Verlag 105/4(2011-12-01), 833-837 0946-2171 105:4<833 2011 105 340 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer