caa a22 4500 44537134X CHVBK 20180317142947.0 cr unu---uuuuu 170323e20111101xx s 000 0 eng 10.1007/s00340-011-4541-0 doi (NATIONALLICENCE)springer-10.1007/s00340-011-4541-0 Bioinspired Si subwavelength gratings by closely-packed silica nanospheres as etch masks for efficient antireflective surface [Elektronische Daten] [B. Park, J. Leem, J. Yu] We experimentally investigate the antireflective properties of various silicon (Si) subwavelength grating (SWG) structures using closely-packed silica nanospheres monolayers with different sizes as etch masks and a subsequent inductively coupled plasma (ICP) etching, together with theoretical calculations based on a rigorous coupled wave analysis method. The geometric structure of Si SWGs is optimized by changing the size of nanospheres and ICP etching parameters. The antireflective properties depend strongly on the period, height, and shape of the hexagonally ordered SWG structures, especially correlated with ICP etching parameters. For an optimized Si SWG structure with a rounded cone shape, the reflectance is significantly reduced, indicating a low reflectance of <4.4% over a wide wavelength region of 300-1100nm. From theoretical analysis, the reflectance of rounded cone-shaped Si SWG structures is minimized with a period of ∼300-350nm and heights of >750nm, which is reasonably consistent with the experimental results. The angle-dependent antireflection characteristics are also discussed. Springer-Verlag, 2011 Park B. Department of Electronics and Radio Engineering, Kyung Hee University, 1 Seocheon-dong, 446-701, Giheung-gu, Yongin-si, Gyeonggi-do, Republic of Korea aut Leem J. Department of Electronics and Radio Engineering, Kyung Hee University, 1 Seocheon-dong, 446-701, Giheung-gu, Yongin-si, Gyeonggi-do, Republic of Korea aut Yu J. Department of Electronics and Radio Engineering, Kyung Hee University, 1 Seocheon-dong, 446-701, Giheung-gu, Yongin-si, Gyeonggi-do, Republic of Korea aut Applied Physics B Springer-Verlag 105/2(2011-11-01), 335-342 0946-2171 105:2<335 2011 105 340 https://doi.org/10.1007/s00340-011-4541-0 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00340-011-4541-0 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Park B. Department of Electronics and Radio Engineering, Kyung Hee University, 1 Seocheon-dong, 446-701, Giheung-gu, Yongin-si, Gyeonggi-do, Republic of Korea aut NATIONALLICENCE 700 1- Leem J. Department of Electronics and Radio Engineering, Kyung Hee University, 1 Seocheon-dong, 446-701, Giheung-gu, Yongin-si, Gyeonggi-do, Republic of Korea aut NATIONALLICENCE 700 1- Yu J. Department of Electronics and Radio Engineering, Kyung Hee University, 1 Seocheon-dong, 446-701, Giheung-gu, Yongin-si, Gyeonggi-do, Republic of Korea aut NATIONALLICENCE 773 0- Applied Physics B Springer-Verlag 105/2(2011-11-01), 335-342 0946-2171 105:2<335 2011 105 340 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer