caa a22 4500 44537165X CHVBK 20180317142948.0 cr unu---uuuuu 170323e20110101xx s 000 0 eng 10.1007/s00340-010-4210-8 doi (NATIONALLICENCE)springer-10.1007/s00340-010-4210-8 Experimental demonstration of near-field focusing of a phase micro-Fresnel zone plate (FZP) under linearly polarized illumination [Elektronische Daten] [R. Mote, S. Yu, A. Kumar, W. Zhou, X. Li] A high numerical aperture binary phase micro-Fresnel zone plate (FZP) is designed and fabricated on a glass substrate by using a focused ion beam technique. Focusing characteristics of the phase micro-FZP are measured by a near-field scanning optical microscope using linearly polarized light as an illumination source. It is found that an asymmetric spot with subwavelength beam width and elongated depth of focus can be obtained from the phase micro-FZP. Furthermore, the measurement is shown to be consistent with the calculation result. Further, the tolerance in fabrication errors like tilt of side walls on focusing is discussed with numerical simulations. Springer-Verlag, 2010 Mote R. Precision Engineering & Nanotechnology Centre, School of Mechanical & Aerospace Engineering, Nanyang Technological University, 639798, Singapore, Singapore aut Yu S. Department of Applied Physics, The Hong Kong Polytechnic University, Hung Hum, Kowloon, Hong Kong, China aut Kumar A. School of Electrical & Electronic Engineering, Nanyang Technological University, 639798, Singapore, Singapore aut Zhou W. Precision Engineering & Nanotechnology Centre, School of Mechanical & Aerospace Engineering, Nanyang Technological University, 639798, Singapore, Singapore aut Li X. School of Electrical & Electronic Engineering, Nanyang Technological University, 639798, Singapore, Singapore aut Applied Physics B Springer-Verlag 102/1(2011-01-01), 95-100 0946-2171 102:1<95 2011 102 340 https://doi.org/10.1007/s00340-010-4210-8 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00340-010-4210-8 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Mote R. Precision Engineering & Nanotechnology Centre, School of Mechanical & Aerospace Engineering, Nanyang Technological University, 639798, Singapore, Singapore aut NATIONALLICENCE 700 1- Yu S. Department of Applied Physics, The Hong Kong Polytechnic University, Hung Hum, Kowloon, Hong Kong, China aut NATIONALLICENCE 700 1- Kumar A. School of Electrical & Electronic Engineering, Nanyang Technological University, 639798, Singapore, Singapore aut NATIONALLICENCE 700 1- Zhou W. Precision Engineering & Nanotechnology Centre, School of Mechanical & Aerospace Engineering, Nanyang Technological University, 639798, Singapore, Singapore aut NATIONALLICENCE 700 1- Li X. School of Electrical & Electronic Engineering, Nanyang Technological University, 639798, Singapore, Singapore aut NATIONALLICENCE 773 0- Applied Physics B Springer-Verlag 102/1(2011-01-01), 95-100 0946-2171 102:1<95 2011 102 340 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer