caa a22 4500 445381434 CHVBK 20180317143018.0 cr unu---uuuuu 170323e20110101xx s 000 0 eng 10.1007/s10948-010-0859-9 doi (NATIONALLICENCE)springer-10.1007/s10948-010-0859-9 The Fabrication of THz Emitting Mesas by Reactive Ion-Beam Etching of Superconducting Bi2212 with Multilayer Masks [Elektronische Daten] [H. Koseoglu, F. Turkoglu, Y. Simsek, L. Ozyuzer] Generation of powerful THz radiation from intrinsic Josephson Junctions (IJJs) of Bi2Sr2CaCu2O8+δ (Bi2212) may require mesas with large lateral dimensions. However, there are difficulties in fabrication of perfect rectangular mesas. The lateral angles of mesas should be close to 90 degrees to obtain IJJs with same planar dimensions for synchronization of IJJs. We patterned Ta/photoresist and photoresist/Ta/photoresist masks on Bi2212 and used selective ion etching to overcome the thick photoresist layer shading on the lateral dimension of mesa during the ion-beam etching. The reactive ion-beam etchings have been done with ion beams of Ar, N2 and O2, and we have obtained mesas about 1 μm with lateral angle of approximately 50 to 75°, which is better than the mesas fabricated with photoresist mask. Springer Science+Business Media, LLC, 2010 Reactive ion-beam etching nationallicence Intrinsic Josephson junctions nationallicence Terahertz radiation nationallicence Bi2212 nationallicence Koseoglu H. Department of Physics, Izmir Institute of Technology, 35430, Izmir, Turkey aut Turkoglu F. Department of Physics, Izmir Institute of Technology, 35430, Izmir, Turkey aut Simsek Y. Department of Physics, Izmir Institute of Technology, 35430, Izmir, Turkey aut Ozyuzer L. Department of Physics, Izmir Institute of Technology, 35430, Izmir, Turkey aut Journal of Superconductivity and Novel Magnetism Springer US; http://www.springer-ny.com 24/1-2(2011-01-01), 1083-1086 1557-1939 24:1-2<1083 2011 24 10948 https://doi.org/10.1007/s10948-010-0859-9 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10948-010-0859-9 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Koseoglu H. Department of Physics, Izmir Institute of Technology, 35430, Izmir, Turkey aut NATIONALLICENCE 700 1- Turkoglu F. Department of Physics, Izmir Institute of Technology, 35430, Izmir, Turkey aut NATIONALLICENCE 700 1- Simsek Y. Department of Physics, Izmir Institute of Technology, 35430, Izmir, Turkey aut NATIONALLICENCE 700 1- Ozyuzer L. Department of Physics, Izmir Institute of Technology, 35430, Izmir, Turkey aut NATIONALLICENCE 773 0- Journal of Superconductivity and Novel Magnetism Springer US; http://www.springer-ny.com 24/1-2(2011-01-01), 1083-1086 1557-1939 24:1-2<1083 2011 24 10948 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer