caa a22 4500 445820748 CHVBK 20180317145243.0 cr unu---uuuuu 170323e20110601xx s 000 0 eng 10.1007/s10825-011-0353-z doi (NATIONALLICENCE)springer-10.1007/s10825-011-0353-z Matsuda Kazunori Department of Nano and Bio Material Engineering, Tokushima Bunri University at Kagawa, 1314-1 Shido Sanuki, 769-2101, Kagawa, Japan aut Equivalent-circuit model for electrostatic micro-torsion mirror [Elektronische Daten] [Kazunori Matsuda] Equivalent circuit model for micro-torsion mirror using open-source circuit simulator is reported, which gives a convenient technique for the design of circuits with electrostatic actuators. In the simulation, linear equations for electrical system, mechanical system, and transducer between both systems are considered. Mathematical operations of these equations are interrupted as appropriate circuits, so that a seamless multi-physics mixed simulation becomes possible. Springer Science+Business Media LLC, 2011 Equivalent circuit nationallicence Micro mirror nationallicence Actuator nationallicence MEMS nationallicence Transducer nationallicence Linear response nationallicence Journal of Computational Electronics Springer US; http://www.springer-ny.com 10/1-2(2011-06-01), 136-140 1569-8025 10:1-2<136 2011 10 10825 https://doi.org/10.1007/s10825-011-0353-z text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10825-011-0353-z text/html Onlinezugriff via DOI NATIONALLICENCE 100 1- Matsuda Kazunori Department of Nano and Bio Material Engineering, Tokushima Bunri University at Kagawa, 1314-1 Shido Sanuki, 769-2101, Kagawa, Japan aut NATIONALLICENCE 773 0- Journal of Computational Electronics Springer US; http://www.springer-ny.com 10/1-2(2011-06-01), 136-140 1569-8025 10:1-2<136 2011 10 10825 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer