caa a22 4500 445826657 CHVBK 20180317145301.0 cr unu---uuuuu 170323e20110901xx s 000 0 eng 10.1007/s10854-011-0302-4 doi (NATIONALLICENCE)springer-10.1007/s10854-011-0302-4 Shi Feng College of Physics and Electronics, Shandong Normal University, 250014, Jinan, People's Republic of China aut Effect of sputtering power on microstructure of dielectric ceramic thin films by RF magnetron sputtering method using (Ba0.3Sr0.7)(Zn1/3Nb2/3)O3 as target [Elektronische Daten] [Feng Shi] Radio frequency (RF) magnetron sputtering method was applied to prepare dielectric ceramic thin films on SiO2 (110) substrates using (Ba0.3Sr0.7)(Zn1/3Nb2/3)O3 microwave dielectric ceramics as target. The samples were deposited at different sputtering powers in Ar atmosphere. In particular, the microstructure and morphology of the thin films were investigated as a function of sputtering powers by X-ray diffraction (XRD), X-ray photoelectron spectroscope (XPS), scanning electron microscopy (SEM), atomic force microscopy (AFM) and transmission electron microscopy (TEM). The results show that the thin films are polycrystalline and the sputtering power significantly influences the surface morphology and microstructure of the thin films. On increasing the sputtering power, the crystallinity improves and the grain size and roughness of the thin films reach maximum values at 200W. Springer Science+Business Media, LLC, 2011 Journal of Materials Science: Materials in Electronics Springer US; http://www.springer-ny.com 22/9(2011-09-01), 1290-1296 0957-4522 22:9<1290 2011 22 10854 https://doi.org/10.1007/s10854-011-0302-4 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10854-011-0302-4 text/html Onlinezugriff via DOI NATIONALLICENCE 100 1- Shi Feng College of Physics and Electronics, Shandong Normal University, 250014, Jinan, People's Republic of China aut NATIONALLICENCE 773 0- Journal of Materials Science: Materials in Electronics Springer US; http://www.springer-ny.com 22/9(2011-09-01), 1290-1296 0957-4522 22:9<1290 2011 22 10854 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer