caa a22 4500 445828072 CHVBK 20180317145305.0 cr unu---uuuuu 170323e20110401xx s 000 0 eng 10.1007/s10854-010-0151-6 doi (NATIONALLICENCE)springer-10.1007/s10854-010-0151-6 Morooka Masami Department of Electrical Engineering, Fukuoka Institute of Technology, Wagirohigashi, 811-0295, Higashi-ku, Fukuoka, Japan aut Distribution of Au atom number in the Au agglomerates generated during the out-diffusion process of supersaturated high-temperature substitutional Au in Si at 900°C [Elektronische Daten] [Masami Morooka] Au atom number in the Au agglomerates generated during the annealing of supersaturated high-temperature substitutional Au in Si at 900°C are measured by SIMS and their distributions have been investigated. The annealing time is chosen as 22.5, 90 or 360h, which corresponds to initial, middle or near final stage of the annealing. Many "initial agglomerates” containing about 2.0×105 Au atoms are generated and the distributions show an abrupt one with the peak at the atom number in the initial and middle stages. The "initial agglomerates” have absorbed supersaturated Au atoms within 0.86μm. The "initial agglomerates” are generated even in the near final stage and grow up to containing about 4×106 Au atoms by absorbing the Au atoms within 2.3μm, finally. As the consequence, many agglomerates contain 5×104-1.3×106 Au atoms resulting in a broad distribution at the near final stage. Schematic models of agglomerations corresponding to each stage are proposed. Springer Science+Business Media, LLC, 2010 Journal of Materials Science: Materials in Electronics Springer US; http://www.springer-ny.com 22/4(2011-04-01), 412-417 0957-4522 22:4<412 2011 22 10854 https://doi.org/10.1007/s10854-010-0151-6 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10854-010-0151-6 text/html Onlinezugriff via DOI NATIONALLICENCE 100 1- Morooka Masami Department of Electrical Engineering, Fukuoka Institute of Technology, Wagirohigashi, 811-0295, Higashi-ku, Fukuoka, Japan aut NATIONALLICENCE 773 0- Journal of Materials Science: Materials in Electronics Springer US; http://www.springer-ny.com 22/4(2011-04-01), 412-417 0957-4522 22:4<412 2011 22 10854 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer