caa a22 4500 445828307 CHVBK 20180317145306.0 cr unu---uuuuu 170323e20110801xx s 000 0 eng 10.1007/s10854-010-0243-3 doi (NATIONALLICENCE)springer-10.1007/s10854-010-0243-3 Properties of RF magnetron sputtered indium tin oxide thin films on externally unheated glass substrate [Elektronische Daten] [K. Patel, M. Desai, C. Panchal] Indium tin oxide (ITO) thin films were deposited by radio frequency (RF) magnetron sputtering onto glass substrates. The transparent and conducting ITO thin films were obtained on externally unheated glass substrate, without any post-heat treatment, and by varying the deposition process parameters such as the working pressure and the RF Power. The effect of the variation of the above deposition parameters on the structural, surface morphology, electrical, and optical properties of the thin films have been studied. A minimum resistivity of 2.36×10−4 Ωcm and 80% transmittance with a figure of merit 37.2×10−3Ω−1 is achieved for the thin films grown on externally unheated substrate with 75W RF power and 0.5mTorr working pressure. Springer Science+Business Media, LLC, 2010 Patel K. Applied Physics Department, Faculty of Technology & Engineering, M. S. University of Baroda, 390001, Vadodara, Gujarat, India aut Desai M. Applied Physics Department, Faculty of Technology & Engineering, M. S. University of Baroda, 390001, Vadodara, Gujarat, India aut Panchal C. Applied Physics Department, Faculty of Technology & Engineering, M. S. University of Baroda, 390001, Vadodara, Gujarat, India aut Journal of Materials Science: Materials in Electronics Springer US; http://www.springer-ny.com 22/8(2011-08-01), 959-965 0957-4522 22:8<959 2011 22 10854 https://doi.org/10.1007/s10854-010-0243-3 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10854-010-0243-3 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Patel K. Applied Physics Department, Faculty of Technology & Engineering, M. S. University of Baroda, 390001, Vadodara, Gujarat, India aut NATIONALLICENCE 700 1- Desai M. Applied Physics Department, Faculty of Technology & Engineering, M. S. University of Baroda, 390001, Vadodara, Gujarat, India aut NATIONALLICENCE 700 1- Panchal C. Applied Physics Department, Faculty of Technology & Engineering, M. S. University of Baroda, 390001, Vadodara, Gujarat, India aut NATIONALLICENCE 773 0- Journal of Materials Science: Materials in Electronics Springer US; http://www.springer-ny.com 22/8(2011-08-01), 959-965 0957-4522 22:8<959 2011 22 10854 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer