caa a22 4500 445830034 CHVBK 20180317145312.0 cr unu---uuuuu 170323e20111101xx s 000 0 eng 10.1007/s10686-011-9261-2 doi (NATIONALLICENCE)springer-10.1007/s10686-011-9261-2 Antenna-coupled arrays of NbSi micro-bolometers [Elektronische Daten] [Aurélien Bideaud, Benoit Belier, Alain Benoit, Laurent Bergé, Philippe Camus, Sophie Collin, Louis Dumoulin, Christian Hoffmann, Stefanos Marnieros, Alessandro Monfardini] Microbolometers are at present the most sensitive detectors for mm and sub-mm Astronomy. They are in use in most of the present instruments in that bandwidth. We have developed filled arrays of NbSi-based planar antenna coupled microbolometers. The fabrication details are given, together with characterization of the NbSi thermometers and optical results. The optical performances are potentially good for ground-based mm-wave astronomy applications, while the overall detectors performances are limited by low-frequency excess noise in the thermometric NbSi high-impedance sensors (Anderson insulator). Springer Science+Business Media B.V., 2011 Bolometers nationallicence Antenna nationallicence Arrays nationallicence mm-wave astronomy nationallicence Bideaud Aurélien Institut Néel, CNRS & Université Joseph Fourier, BP 166, 38042, Grenoble Cedex 9, France aut Belier Benoit IEF, Orsay, France aut Benoit Alain Institut Néel, CNRS & Université Joseph Fourier, BP 166, 38042, Grenoble Cedex 9, France aut Bergé Laurent CSNSM, CNRS, Orsay, France aut Camus Philippe Institut Néel, CNRS & Université Joseph Fourier, BP 166, 38042, Grenoble Cedex 9, France aut Collin Sophie CSNSM, CNRS, Orsay, France aut Dumoulin Louis CSNSM, CNRS, Orsay, France aut Hoffmann Christian Institut Néel, CNRS & Université Joseph Fourier, BP 166, 38042, Grenoble Cedex 9, France aut Marnieros Stefanos CSNSM, CNRS, Orsay, France aut Monfardini Alessandro Institut Néel, CNRS & Université Joseph Fourier, BP 166, 38042, Grenoble Cedex 9, France aut Experimental Astronomy Springer Netherlands 32/2(2011-11-01), 179-191 0922-6435 32:2<179 2011 32 10686 https://doi.org/10.1007/s10686-011-9261-2 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10686-011-9261-2 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Bideaud Aurélien Institut Néel, CNRS & Université Joseph Fourier, BP 166, 38042, Grenoble Cedex 9, France aut NATIONALLICENCE 700 1- Belier Benoit IEF, Orsay, France aut NATIONALLICENCE 700 1- Benoit Alain Institut Néel, CNRS & Université Joseph Fourier, BP 166, 38042, Grenoble Cedex 9, France aut NATIONALLICENCE 700 1- Bergé Laurent CSNSM, CNRS, Orsay, France aut NATIONALLICENCE 700 1- Camus Philippe Institut Néel, CNRS & Université Joseph Fourier, BP 166, 38042, Grenoble Cedex 9, France aut NATIONALLICENCE 700 1- Collin Sophie CSNSM, CNRS, Orsay, France aut NATIONALLICENCE 700 1- Dumoulin Louis CSNSM, CNRS, Orsay, France aut NATIONALLICENCE 700 1- Hoffmann Christian Institut Néel, CNRS & Université Joseph Fourier, BP 166, 38042, Grenoble Cedex 9, France aut NATIONALLICENCE 700 1- Marnieros Stefanos CSNSM, CNRS, Orsay, France aut NATIONALLICENCE 700 1- Monfardini Alessandro Institut Néel, CNRS & Université Joseph Fourier, BP 166, 38042, Grenoble Cedex 9, France aut NATIONALLICENCE 773 0- Experimental Astronomy Springer Netherlands 32/2(2011-11-01), 179-191 0922-6435 32:2<179 2011 32 10686 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer