caa a22 4500 445838515 CHVBK 20180317145337.0 cr unu---uuuuu 170323e20111201xx s 000 0 eng 10.1007/s10951-010-0222-9 doi (NATIONALLICENCE)springer-10.1007/s10951-010-0222-9 A survey of problems, solution techniques, and future challenges in scheduling semiconductor manufacturing operations [Elektronische Daten] [Lars Mönch, John Fowler, Stéphane Dauzère-Pérès, Scott Mason, Oliver Rose] In this paper, we discuss scheduling problems in semiconductor manufacturing. Starting from describing the manufacturing process, we identify typical scheduling problems found in semiconductor manufacturing systems. We describe batch scheduling problems, parallel machine scheduling problems, job shop scheduling problems, scheduling problems with auxiliary resources, multiple orders per job scheduling problems, and scheduling problems related to cluster tools. We also present important solution techniques that are used to solve these scheduling problems by means of specific examples, and report on known implementations. Finally, we summarize some of the challenges in scheduling semiconductor manufacturing operations. Springer Science+Business Media, LLC, 2010 Scheduling nationallicence Semiconductor manufacturing nationallicence Survey nationallicence Mönch Lars Department of Mathematics and Computer Science, University of Hagen, 58097, Hagen, Germany aut Fowler John School of Computing, Informatics, and Decision Systems Engineering, Arizona State University, 85287, Tempe, AZ, USA aut Dauzère-Pérès Stéphane Department of Manufacturing Sciences and Logistics, Ecole des Mines de Saint-Etienne, 13541, Gardanne, France aut Mason Scott Department of Industrial Engineering, Clemson University, 29634, Clemson, SC, USA aut Rose Oliver Institute of Applied Computer Science, Dresden University of Technology, 01062, Dresden, Germany aut Journal of Scheduling Springer US; http://www.springer-ny.com 14/6(2011-12-01), 583-599 1094-6136 14:6<583 2011 14 10951 https://doi.org/10.1007/s10951-010-0222-9 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10951-010-0222-9 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Mönch Lars Department of Mathematics and Computer Science, University of Hagen, 58097, Hagen, Germany aut NATIONALLICENCE 700 1- Fowler John School of Computing, Informatics, and Decision Systems Engineering, Arizona State University, 85287, Tempe, AZ, USA aut NATIONALLICENCE 700 1- Dauzère-Pérès Stéphane Department of Manufacturing Sciences and Logistics, Ecole des Mines de Saint-Etienne, 13541, Gardanne, France aut NATIONALLICENCE 700 1- Mason Scott Department of Industrial Engineering, Clemson University, 29634, Clemson, SC, USA aut NATIONALLICENCE 700 1- Rose Oliver Institute of Applied Computer Science, Dresden University of Technology, 01062, Dresden, Germany aut NATIONALLICENCE 773 0- Journal of Scheduling Springer US; http://www.springer-ny.com 14/6(2011-12-01), 583-599 1094-6136 14:6<583 2011 14 10951 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer