caa a22 4500 445865350 CHVBK 20180317145456.0 cr unu---uuuuu 170323e20111001xx s 000 0 eng 10.1140/epjd/e2011-20213-2 doi (NATIONALLICENCE)springer-10.1140/epjd/e2011-20213-2 Influence of plasma chemistry on oxygen triplets [Elektronische Daten] [V. Milosavljević, A. Ellingboe, S. Daniels] The plasma chemistry of fluorocarbon-oxygen-argon discharges and its influence on prominent oxygen triplets are studied. The oxygen 777 triplet is very important for the measurement of atomic oxygen in low pressure plasmas, since the 777.417nm spectral line is frequently used for actinometry. In this paper, we identify changes in the individual 777 triplet lines arising from cascade effects from higher energy levels of oxygen, and from resonant energy transfer from energetic carbon atoms in carbon-rich plasmas. The lower energy levels of three oxygen triplets (544nm, 616nm, 645nm) are the upper states of the 777 triplet. Increased emission intensity from the 544, 616, and 645 triplets result in changes to the relative intensity of the individual lines of the 777 triplet, and this can lead to errors in using the 777 triplet, e.g. for actinometry. Also, in operational conditions with strong carbon emission (around 601 nm), the relative intensity of the individual oxygen 777 lines is affected. The upper energy levels of these carbon lines is close to the oxygen 777 upper energy levels, suggesting that resonant energy transfer between the carbon and the oxygen is occurring. The experiments are performed in a commercial semiconductor dielectric etcher operating with dual rf frequencies of 2MHz and 27MHz. Pressure (13-19Pa), rf power (200-1200W), and gas mixtures (argon with addmixtures of 5-13% oxygen and C4F8) are typical in application to dielectric etching. EDP Sciences, SIF, Springer-Verlag Berlin Heidelberg, 2011 Milosavljević V. NCPST & School of Physics, Dublin City University, Dublin, Ireland aut Ellingboe A. Plasma Research Lab, School of Physics & NCPST, Dublin City University, 9 Dublin, Ireland aut Daniels S. NCPST & School of Electronic Engineering, Dublin City University, 9 Dublin, Ireland aut The European Physical Journal D Springer-Verlag 64/2-3(2011-10-01), 437-445 1434-6060 64:2-3<437 2011 64 10053 https://doi.org/10.1140/epjd/e2011-20213-2 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1140/epjd/e2011-20213-2 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Milosavljević V. NCPST & School of Physics, Dublin City University, Dublin, Ireland aut NATIONALLICENCE 700 1- Ellingboe A. Plasma Research Lab, School of Physics & NCPST, Dublin City University, 9 Dublin, Ireland aut NATIONALLICENCE 700 1- Daniels S. NCPST & School of Electronic Engineering, Dublin City University, 9 Dublin, Ireland aut NATIONALLICENCE 773 0- The European Physical Journal D Springer-Verlag 64/2-3(2011-10-01), 437-445 1434-6060 64:2-3<437 2011 64 10053 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer