caa a22 4500 445865490 CHVBK 20180317145456.0 cr unu---uuuuu 170323e20111001xx s 000 0 eng 10.1140/epjd/e2011-20393-7 doi (NATIONALLICENCE)springer-10.1140/epjd/e2011-20393-7 Growth and properties of Ti-Cu films with respect to plasma parameters in dual-magnetron sputtering discharges [Elektronische Daten] [V. Stranak, H. Wulff, R. Bogdanowicz, S. Drache, Z. Hubicka, M. Cada, M. Tichy, R. Hippler] Properties of different methods of magnetron sputtering (dc-MS, dual-MS and dual-HiPIMS) are studied and compared with respect to intermetallic Ti-Cu film formation. The quality and features of thin films are strongly influenced by the energy of incoming particles. The ion velocity distribution functions(IVDFs) were measured by time-resolved retarding field analyzer(RFA) in the substrate position. Thin films were characterized by X-ray photoelectron spectroscopy (XPS), X-ray diffractometry(XRD) and X-ray reflectometry(XR). Properties and crystallography of Ti-Cu films are discussed as a function of ion energy which is affected by the mode of sputtering. It was found that IVDFsmeasured in pulsed discharges exhibit double-peak distribution. The IVDFs reach the maximum at ion energies about ~8eV. The ion saturated current is highest in dual-HiPIMS discharge (~5μA/cm2) and is mostly represented by Cu+ and Ar+ ions. The mode of sputtering influences chemical composition and film formation. The copper forms polycrystalline fcc-phase while much smaller Ti particles enwraps the copper crystallites or are part of a solid solution. EDP Sciences, SIF, Springer-Verlag Berlin Heidelberg, 2011 Stranak V. Institut für Physik, Ernst-Moritz-Arndt-Universität Greifswald, Felix-Hausdorff-Str. 6, 17489, Greifswald, Germany aut Wulff H. Institut für Physik, Ernst-Moritz-Arndt-Universität Greifswald, Felix-Hausdorff-Str. 6, 17489, Greifswald, Germany aut Bogdanowicz R. Institut für Physik, Ernst-Moritz-Arndt-Universität Greifswald, Felix-Hausdorff-Str. 6, 17489, Greifswald, Germany aut Drache S. Institut für Physik, Ernst-Moritz-Arndt-Universität Greifswald, Felix-Hausdorff-Str. 6, 17489, Greifswald, Germany aut Hubicka Z. Institute of Physics v. v. i., Academy of Science of the Czech Republic, Na Slovance 2, 182 21, Prague, Czech Republic aut Cada M. Institute of Physics v. v. i., Academy of Science of the Czech Republic, Na Slovance 2, 182 21, Prague, Czech Republic aut Tichy M. Faculty of Mathematics and Physics, Charles University in Prague, V Holešovičkách 2, 180 00, Prague, Czech Republic aut Hippler R. Institut für Physik, Ernst-Moritz-Arndt-Universität Greifswald, Felix-Hausdorff-Str. 6, 17489, Greifswald, Germany aut The European Physical Journal D Springer-Verlag 64/2-3(2011-10-01), 427-435 1434-6060 64:2-3<427 2011 64 10053 https://doi.org/10.1140/epjd/e2011-20393-7 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1140/epjd/e2011-20393-7 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Stranak V. Institut für Physik, Ernst-Moritz-Arndt-Universität Greifswald, Felix-Hausdorff-Str. 6, 17489, Greifswald, Germany aut NATIONALLICENCE 700 1- Wulff H. Institut für Physik, Ernst-Moritz-Arndt-Universität Greifswald, Felix-Hausdorff-Str. 6, 17489, Greifswald, Germany aut NATIONALLICENCE 700 1- Bogdanowicz R. Institut für Physik, Ernst-Moritz-Arndt-Universität Greifswald, Felix-Hausdorff-Str. 6, 17489, Greifswald, Germany aut NATIONALLICENCE 700 1- Drache S. Institut für Physik, Ernst-Moritz-Arndt-Universität Greifswald, Felix-Hausdorff-Str. 6, 17489, Greifswald, Germany aut NATIONALLICENCE 700 1- Hubicka Z. Institute of Physics v. v. i., Academy of Science of the Czech Republic, Na Slovance 2, 182 21, Prague, Czech Republic aut NATIONALLICENCE 700 1- Cada M. Institute of Physics v. v. i., Academy of Science of the Czech Republic, Na Slovance 2, 182 21, Prague, Czech Republic aut NATIONALLICENCE 700 1- Tichy M. Faculty of Mathematics and Physics, Charles University in Prague, V Holešovičkách 2, 180 00, Prague, Czech Republic aut NATIONALLICENCE 700 1- Hippler R. Institut für Physik, Ernst-Moritz-Arndt-Universität Greifswald, Felix-Hausdorff-Str. 6, 17489, Greifswald, Germany aut NATIONALLICENCE 773 0- The European Physical Journal D Springer-Verlag 64/2-3(2011-10-01), 427-435 1434-6060 64:2-3<427 2011 64 10053 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer