Metal imaging on surface of micro- and nanoelectronic devices by laser ablation inductively coupled plasma mass spectrometry and possibility to measure at nanometer range
Gespeichert in:
Verfasser / Beitragende:
[Myroslav Zoriy, Dirk Mayer, J. Becker]
Ort, Verlag, Jahr:
2009
Enthalten in:
Journal of the American Society for Mass Spectrometry, 20/5(2009-05-01), 883-890
Format:
Artikel (online)
Online Zugang: