Growth of AlN Films and Its Process Development for the Fabrication of Acoustic Devices and Micromachined Structures

Verfasser / Beitragende:
[J. Kar, G. Bose, S. Tuli, A. Dangwal, S. Mukherjee]
Ort, Verlag, Jahr:
2009
Enthalten in:
Journal of Materials Engineering and Performance, 18/8(2009-11-01), 1046-1051
Format:
Artikel (online)
ID: 453629253