Prospects for the application of nanostructured polymer and nanocomposite films based on poly-p-xylylene for micro-, opto-, and nanoelectronics
Gespeichert in:
Verfasser / Beitragende:
[A. Gusev, K. Mailyan, A. Pebalk, I. Ryzhikov, S. Chvalun]
Ort, Verlag, Jahr:
2009
Enthalten in:
Journal of Communications Technology and Electronics, 54/7(2009-07-01), 833-843
Format:
Artikel (online)
Online Zugang: