Filling the vacuum chamber of a technological system with homogeneous plasma using a stationary glow discharge

Verfasser / Beitragende:
[A. Metel, S. Grigoriev, Yu. Melnik, V. Panin]
Ort, Verlag, Jahr:
2009
Enthalten in:
Plasma Physics Reports, 35/12(2009-12-01), 1058-1067
Format:
Artikel (online)
ID: 453683517