Measurements and calculations of the electron distribution function in the electronegative plasma of a hollow-cathode discharge in N2: SF6 mixtures

Verfasser / Beitragende:
[V. Tsiolko, V. Bazhenov, A. Shchedrin, A. Kalyuzhnaya]
Ort, Verlag, Jahr:
2009
Enthalten in:
Plasma Physics Reports, 35/10(2009-10-01), 883-889
Format:
Artikel (online)
ID: 453683746