Preparation of AlN thin films for film bulk acoustic resonator application by radio frequency sputtering

Verfasser / Beitragende:
[Kan Li, Hao Jin, De-miao Wang, Yi-fei Tang]
Ort, Verlag, Jahr:
2009
Enthalten in:
Journal of Zhejiang University-SCIENCE A, 10/3(2009-03-01), 464-470
Format:
Artikel (online)
ID: 453697097