An in-plane low-noise accelerometer fabricated with an improved process flow

Verfasser / Beitragende:
[Xu-dong Zheng, Zhong-he Jin, Yue-lin Wang, Wei-jun Lin, Xiao-qi Zhou]
Ort, Verlag, Jahr:
2009
Enthalten in:
Journal of Zhejiang University-SCIENCE A, 10/10(2009-10-01), 1413-1420
Format:
Artikel (online)
ID: 453697186