caa a22 4500 463211472 CHVBK 20180405153142.0 cr unu---uuuuu 170326e20070901xx s 000 0 eng 10.1007/s00339-007-4045-2 doi (NATIONALLICENCE)springer-10.1007/s00339-007-4045-2 Annealing effects of sapphire substrate on properties of ZnO films grown by magnetron sputtering [Elektronische Daten] [Y.Z. Wang, J. Xu] The annealing effects of sapphire substrates on the quality of epitaxial ZnO films grown by dc reactive magnetron sputtering were studied. The atomic steps formed on (0001) sapphire (α-Al2O3) substrates surface by annealing at high temperature were analyzed by atomic force microscopy. Their influence on the growth of ZnO films was examined by X-ray diffraction and photoluminescence measurements. Experimental results indicate that the film quality is strongly affected by annealing treatment of the sapphire substrate surface. The optimum annealing temperature of sapphire substrates for ZnO grown by magnetron sputtering is 1400°C for 1h in air. Springer-Verlag, 2007 Wang Y.Z. School of Physics & Telecommunication Engineering, South China Normal University, 510006, Guangzhou, P.R. China aut Xu J. Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P.O. Box 800-211, 201800, Shanghai, P.R. China aut Applied Physics A Springer-Verlag 88/4(2007-09-01), 727-729 0947-8396 88:4<727 2007 88 339 https://doi.org/10.1007/s00339-007-4045-2 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00339-007-4045-2 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Wang Y.Z. School of Physics & Telecommunication Engineering, South China Normal University, 510006, Guangzhou, P.R. China aut NATIONALLICENCE 700 1- Xu J. Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P.O. Box 800-211, 201800, Shanghai, P.R. China aut NATIONALLICENCE 773 0- Applied Physics A Springer-Verlag 88/4(2007-09-01), 727-729 0947-8396 88:4<727 2007 88 339 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer