caa a22 4500 463211529 CHVBK 20180405153142.0 cr unu---uuuuu 170326e20070901xx s 000 0 eng 10.1007/s00339-007-4140-4 doi (NATIONALLICENCE)springer-10.1007/s00339-007-4140-4 Laser micromachining of porous anodic alumina film [Elektronische Daten] [H. Jha, T. Kikuchi, M. Sakairi, H. Takahashi] A laser direct-write process on porous anodic alumina film is carried out for the fabrication of microstructure on the film, using nanosecond, second harmonic Nd:YAG laser. Laser micromachining can be preformed in two different ways on colored and pore-sealed anodic alumina film, to generate microstructures on the film. Removal of the aluminum substrate before laser irradiation greatly improves the shape characteristics of the microstructure. The depth of microstructures can be controlled by the power and the scanning speed of the laser beam. Several structures with depths from 1 to 35μm were fabricated on anodic alumina film with good precision and reproducibility. Springer-Verlag, 2007 Jha H. Lab. of Interface Microstructure Analysis (LIMSA), Division of Materials Science and Engineering, Graduate School of Engineering, Hokkaido University, Kita-13 Nishi-8, Kita-Ku, 060-8628, Sapporo, Japan aut Kikuchi T. Lab. of Interface Microstructure Analysis (LIMSA), Division of Materials Science and Engineering, Graduate School of Engineering, Hokkaido University, Kita-13 Nishi-8, Kita-Ku, 060-8628, Sapporo, Japan aut Sakairi M. Lab. of Interface Microstructure Analysis (LIMSA), Division of Materials Science and Engineering, Graduate School of Engineering, Hokkaido University, Kita-13 Nishi-8, Kita-Ku, 060-8628, Sapporo, Japan aut Takahashi H. Lab. of Interface Microstructure Analysis (LIMSA), Division of Materials Science and Engineering, Graduate School of Engineering, Hokkaido University, Kita-13 Nishi-8, Kita-Ku, 060-8628, Sapporo, Japan aut Applied Physics A Springer-Verlag 88/4(2007-09-01), 617-622 0947-8396 88:4<617 2007 88 339 https://doi.org/10.1007/s00339-007-4140-4 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00339-007-4140-4 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Jha H. Lab. of Interface Microstructure Analysis (LIMSA), Division of Materials Science and Engineering, Graduate School of Engineering, Hokkaido University, Kita-13 Nishi-8, Kita-Ku, 060-8628, Sapporo, Japan aut NATIONALLICENCE 700 1- Kikuchi T. Lab. of Interface Microstructure Analysis (LIMSA), Division of Materials Science and Engineering, Graduate School of Engineering, Hokkaido University, Kita-13 Nishi-8, Kita-Ku, 060-8628, Sapporo, Japan aut NATIONALLICENCE 700 1- Sakairi M. Lab. of Interface Microstructure Analysis (LIMSA), Division of Materials Science and Engineering, Graduate School of Engineering, Hokkaido University, Kita-13 Nishi-8, Kita-Ku, 060-8628, Sapporo, Japan aut NATIONALLICENCE 700 1- Takahashi H. Lab. of Interface Microstructure Analysis (LIMSA), Division of Materials Science and Engineering, Graduate School of Engineering, Hokkaido University, Kita-13 Nishi-8, Kita-Ku, 060-8628, Sapporo, Japan aut NATIONALLICENCE 773 0- Applied Physics A Springer-Verlag 88/4(2007-09-01), 617-622 0947-8396 88:4<617 2007 88 339 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer