caa a22 4500 463211634 CHVBK 20180405153142.0 cr unu---uuuuu 170326e20070901xx s 000 0 eng 10.1007/s00339-007-4030-9 doi (NATIONALLICENCE)springer-10.1007/s00339-007-4030-9 Optical waveguide fabrication and integration with a micro-mirror inside photosensitive glass by femtosecond laser direct writing [Elektronische Daten] [Z. Wang, K. Sugioka, Y. Hanada, K. Midorikawa] Photosensitive glass is a potentially important material for micro-fluidic devices that can be integrated with micro-optical components for biochemical analysis. Here, we demonstrate the fabrication of optical waveguides inside glass by femtosecond laser direct writing. The influence of the laser parameters on the waveguide properties is investigated, and it is revealed that the waveguide mode can be well controlled. The single mode is achieved at a low writing energy, while the multimode is achieved with increasing energy. In spite of a longitudinally elongated elliptical shape of the cross-sectional profile, the far-field pattern of the single-mode waveguide shows an almost symmetric profile. The measured propagation loss and the coupling loss are evaluated to be ∼0.6dB/cm and ∼1.6dB at a wavelength of 632.8nm, respectively, under the conditions of 1.0-2.0μJ pulse energy and 200-500μm/s scan speed. The increased optical loss is associated with a higher waveguide mode at higher writing energy. Furthermore, the integration of waveguides and a micromirror made of a hollow microplate inside the glass is demonstrated to bend the laser beam at an angle of 90° in a small chip. The bending loss is estimated to be smaller than 0.3dB. Springer-Verlag, 2007 Wang Z. Laser Technology Laboratory, RIKEN - The Institute of Physical and Chemical Research, Hirosawa 2-1, Wako, 351-0198, Saitama, Japan aut Sugioka K. Laser Technology Laboratory, RIKEN - The Institute of Physical and Chemical Research, Hirosawa 2-1, Wako, 351-0198, Saitama, Japan aut Hanada Y. Laser Technology Laboratory, RIKEN - The Institute of Physical and Chemical Research, Hirosawa 2-1, Wako, 351-0198, Saitama, Japan aut Midorikawa K. Laser Technology Laboratory, RIKEN - The Institute of Physical and Chemical Research, Hirosawa 2-1, Wako, 351-0198, Saitama, Japan aut Applied Physics A Springer-Verlag 88/4(2007-09-01), 699-704 0947-8396 88:4<699 2007 88 339 https://doi.org/10.1007/s00339-007-4030-9 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00339-007-4030-9 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Wang Z. Laser Technology Laboratory, RIKEN - The Institute of Physical and Chemical Research, Hirosawa 2-1, Wako, 351-0198, Saitama, Japan aut NATIONALLICENCE 700 1- Sugioka K. Laser Technology Laboratory, RIKEN - The Institute of Physical and Chemical Research, Hirosawa 2-1, Wako, 351-0198, Saitama, Japan aut NATIONALLICENCE 700 1- Hanada Y. Laser Technology Laboratory, RIKEN - The Institute of Physical and Chemical Research, Hirosawa 2-1, Wako, 351-0198, Saitama, Japan aut NATIONALLICENCE 700 1- Midorikawa K. Laser Technology Laboratory, RIKEN - The Institute of Physical and Chemical Research, Hirosawa 2-1, Wako, 351-0198, Saitama, Japan aut NATIONALLICENCE 773 0- Applied Physics A Springer-Verlag 88/4(2007-09-01), 699-704 0947-8396 88:4<699 2007 88 339 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer