caa a22 4500 46321174X CHVBK 20180405153143.0 cr unu---uuuuu 170326e20070901xx s 000 0 eng 10.1007/s00339-007-4032-7 doi (NATIONALLICENCE)springer-10.1007/s00339-007-4032-7 Sacrificial etching of AlxGa1-xAs for III-V MEMS surface micromachining [Elektronische Daten] [P. Kumar, S. Kanakaraju, D.L. DeVoe] A study of AlxGa1-xAs as a sacrificial film for surface micromachining is presented. AlxGa1-xAs etch rate and selectivity are measured over a range of aluminum mole fractions and HF etchant concentrations during the release of structural features up to 500μm in width. The etch process is found to be diffusion limited, with an inverse power law relationship between etch depth and etch rate. Excellent selectivity greater than 105 is achieved between sacrificial AlAs and structural GaAs, even for long etches up to 250μm in length. Compared with previous studies of AlxGa1-xAs etching for epitaxial liftoff processing, measured etch rates for surface micromachining are approximately an order of magnitude lower, primarily due to the longer effective etch lengths required. However, unlike epitaxial liftoff, AlxGa1-xAs surface micromachining is compatible with higher HF concentrations which can provide comparable overall etch rates, with important implications for AlGaAs MEMS fabrication. Springer-Verlag, 2007 Kumar P. Department of Mechanical Engineering, University of Maryland, 20742, College Park, MD, USA aut Kanakaraju S. Laboratory for Physical Sciences, 8050 Greenmead Drive, 20740, College Park, MD, USA aut DeVoe D.L. Department of Mechanical Engineering, University of Maryland, 20742, College Park, MD, USA aut Applied Physics A Springer-Verlag 88/4(2007-09-01), 711-714 0947-8396 88:4<711 2007 88 339 https://doi.org/10.1007/s00339-007-4032-7 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00339-007-4032-7 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Kumar P. Department of Mechanical Engineering, University of Maryland, 20742, College Park, MD, USA aut NATIONALLICENCE 700 1- Kanakaraju S. Laboratory for Physical Sciences, 8050 Greenmead Drive, 20740, College Park, MD, USA aut NATIONALLICENCE 700 1- DeVoe D.L. Department of Mechanical Engineering, University of Maryland, 20742, College Park, MD, USA aut NATIONALLICENCE 773 0- Applied Physics A Springer-Verlag 88/4(2007-09-01), 711-714 0947-8396 88:4<711 2007 88 339 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer