caa a22 4500 463211774 CHVBK 20180405153143.0 cr unu---uuuuu 170326e20070901xx s 000 0 eng 10.1007/s00339-007-4041-6 doi (NATIONALLICENCE)springer-10.1007/s00339-007-4041-6 Characterization and optimization of magnetron sputtered Sc/Si multilayers for extreme ultraviolet optics [Elektronische Daten] [J. Gautier, F. Delmotte, F. Bridou, M.F. Ravet, F. Varniere, M. Roulliay, A. Jerome, I. Vickridge] Scandium/silicon multilayers have been deposited by magnetron sputtering and characterized by several techniques. Experimental peak reflectances of 0.22 and 0.37 have been measured respectively at wavelengths of 40nm and 46nm, for 10° incidence angle. The corresponding theoretical values for a perfect Sc/Si structure are respectively 0.38 and 0.57. In order to explain these differences between calculated and measured reflectivity, thin film and multilayer characterizations have been done. Effects of multilayer imperfections on the reflectivity have been estimated independently by means of simulation. Based on these results, a new design of Sc/Si multilayer is proposed with top layer thickness optimization. With this design, the experimental peak reflectance reaches 0.46 at a wavelength of 46nm. Springer-Verlag, 2007 Gautier J. Laboratoire Charles Fabry de l'Institut d'Optique, CNRS, Univ. Paris Sud, Campus Polytechnique, RD128, 91127, Palaiseau Cedex, France aut Delmotte F. Laboratoire Charles Fabry de l'Institut d'Optique, CNRS, Univ. Paris Sud, Campus Polytechnique, RD128, 91127, Palaiseau Cedex, France aut Bridou F. Laboratoire Charles Fabry de l'Institut d'Optique, CNRS, Univ. Paris Sud, Campus Polytechnique, RD128, 91127, Palaiseau Cedex, France aut Ravet M.F. Laboratoire Charles Fabry de l'Institut d'Optique, CNRS, Univ. Paris Sud, Campus Polytechnique, RD128, 91127, Palaiseau Cedex, France aut Varniere F. Laboratoire Charles Fabry de l'Institut d'Optique, CNRS, Univ. Paris Sud, Campus Polytechnique, RD128, 91127, Palaiseau Cedex, France aut Roulliay M. Laboratoire Charles Fabry de l'Institut d'Optique, CNRS, Univ. Paris Sud, Campus Polytechnique, RD128, 91127, Palaiseau Cedex, France aut Jerome A. Laboratoire Charles Fabry de l'Institut d'Optique, CNRS, Univ. Paris Sud, Campus Polytechnique, RD128, 91127, Palaiseau Cedex, France aut Vickridge I. Institut des NanoSciences de Paris, Campus Boucicaut, 140 rue de Lourmel, 75015, Paris, France aut Applied Physics A Springer-Verlag 88/4(2007-09-01), 719-725 0947-8396 88:4<719 2007 88 339 https://doi.org/10.1007/s00339-007-4041-6 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00339-007-4041-6 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Gautier J. Laboratoire Charles Fabry de l'Institut d'Optique, CNRS, Univ. Paris Sud, Campus Polytechnique, RD128, 91127, Palaiseau Cedex, France aut NATIONALLICENCE 700 1- Delmotte F. Laboratoire Charles Fabry de l'Institut d'Optique, CNRS, Univ. Paris Sud, Campus Polytechnique, RD128, 91127, Palaiseau Cedex, France aut NATIONALLICENCE 700 1- Bridou F. Laboratoire Charles Fabry de l'Institut d'Optique, CNRS, Univ. Paris Sud, Campus Polytechnique, RD128, 91127, Palaiseau Cedex, France aut NATIONALLICENCE 700 1- Ravet M.F. Laboratoire Charles Fabry de l'Institut d'Optique, CNRS, Univ. Paris Sud, Campus Polytechnique, RD128, 91127, Palaiseau Cedex, France aut NATIONALLICENCE 700 1- Varniere F. Laboratoire Charles Fabry de l'Institut d'Optique, CNRS, Univ. Paris Sud, Campus Polytechnique, RD128, 91127, Palaiseau Cedex, France aut NATIONALLICENCE 700 1- Roulliay M. Laboratoire Charles Fabry de l'Institut d'Optique, CNRS, Univ. Paris Sud, Campus Polytechnique, RD128, 91127, Palaiseau Cedex, France aut NATIONALLICENCE 700 1- Jerome A. Laboratoire Charles Fabry de l'Institut d'Optique, CNRS, Univ. Paris Sud, Campus Polytechnique, RD128, 91127, Palaiseau Cedex, France aut NATIONALLICENCE 700 1- Vickridge I. Institut des NanoSciences de Paris, Campus Boucicaut, 140 rue de Lourmel, 75015, Paris, France aut NATIONALLICENCE 773 0- Applied Physics A Springer-Verlag 88/4(2007-09-01), 719-725 0947-8396 88:4<719 2007 88 339 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer