caa a22 4500 463211863 CHVBK 20180405153143.0 cr unu---uuuuu 170326e20070801xx s 000 0 eng 10.1007/s00339-007-4017-6 doi (NATIONALLICENCE)springer-10.1007/s00339-007-4017-6 Matrix laser cleaning: a new technique for the removal of nanometer sized particles from semiconductors [Elektronische Daten] [J. Graf, B.S. Luk'yanchuk, M. Mosbacher, M.H. Hong, C.T. Chong, J. Boneberg, P. Leiderer] In this paper a new laser-based technique for the removal of nanoparticles from silicon wafers, called matrix laser cleaning, is introduced. In contrast to the already existing technique dry laser cleaning damages of the substrate can be avoided. Furthermore no liquids are used, avoiding problems that occur, e.g. in steam laser cleaning and other wet cleaning techniques. We show that damage free particle removal of polystyrene particles with diameters of at least down to 50nm is possible with a cleaning efficiency very close to 100% within a single shot experiment. Furthermore the cleaning threshold is independent of the particle size. Springer-Verlag, 2007 Graf J. University of Konstanz, Universitaetsstrasse 10, 78457, Konstanz, Germany aut Luk'yanchuk B.S. Data Storage Institute, Agency for Science, Technology and Research, 117608, Singapore, Singapore aut Mosbacher M. University of Konstanz, Universitaetsstrasse 10, 78457, Konstanz, Germany aut Hong M.H. Data Storage Institute, Agency for Science, Technology and Research, 117608, Singapore, Singapore aut Chong C.T. Data Storage Institute, Agency for Science, Technology and Research, 117608, Singapore, Singapore aut Boneberg J. University of Konstanz, Universitaetsstrasse 10, 78457, Konstanz, Germany aut Leiderer P. University of Konstanz, Universitaetsstrasse 10, 78457, Konstanz, Germany aut Applied Physics A Springer-Verlag 88/2(2007-08-01), 227-230 0947-8396 88:2<227 2007 88 339 https://doi.org/10.1007/s00339-007-4017-6 text/html Onlinezugriff via DOI 1 brief-communication jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00339-007-4017-6 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Graf J. University of Konstanz, Universitaetsstrasse 10, 78457, Konstanz, Germany aut NATIONALLICENCE 700 1- Luk'yanchuk B.S. Data Storage Institute, Agency for Science, Technology and Research, 117608, Singapore, Singapore aut NATIONALLICENCE 700 1- Mosbacher M. University of Konstanz, Universitaetsstrasse 10, 78457, Konstanz, Germany aut NATIONALLICENCE 700 1- Hong M.H. Data Storage Institute, Agency for Science, Technology and Research, 117608, Singapore, Singapore aut NATIONALLICENCE 700 1- Chong C.T. Data Storage Institute, Agency for Science, Technology and Research, 117608, Singapore, Singapore aut NATIONALLICENCE 700 1- Boneberg J. University of Konstanz, Universitaetsstrasse 10, 78457, Konstanz, Germany aut NATIONALLICENCE 700 1- Leiderer P. University of Konstanz, Universitaetsstrasse 10, 78457, Konstanz, Germany aut NATIONALLICENCE 773 0- Applied Physics A Springer-Verlag 88/2(2007-08-01), 227-230 0947-8396 88:2<227 2007 88 339 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer