caa a22 4500 463212215 CHVBK 20180405153144.0 cr unu---uuuuu 170326e20070801xx s 000 0 eng 10.1007/s00339-007-3938-4 doi (NATIONALLICENCE)springer-10.1007/s00339-007-3938-4 Effect of phosphorus content on structural properties of phosphorus incorporated tetrahedral amorphous carbon films [Elektronische Daten] [J.C. Han, A.P. Liu, J.Q. Zhu, M.L. Tan, H.P. Wu] With phosphorus incorporated tetrahedral amorphous carbon (ta-C:P) films prepared using filtered cathodic vacuum arc technique with PH3 as the dopant source, we investigate the effect of phosphorus content on the structural properties of the films by X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. XPS analysis indicates that a function is established between the atomic fraction of phosphorus in the samples and the flow rate of PH3 during deposition, and that phosphorus implantation increases the graphite-like trihedral sp2 bonds deduced from fitted C 1s and P 2p core level spectra. Raman spectra of a broad range show that there are two notable features for all ta-C:P films: the first-order band centered at about 1560cm-1 and the second-order band between 2400 and 3400cm-1. The broad first-order band demonstrates that the amorphous structure of all samples does not remarkably change when a lower flow rate of PH3 is implanted, while a higher concentration of phosphorus impurity enhances the clustering of sp2 sites dispersed in sp3 skeleton and the evolution of structural ordering. Furthermore, the second-order Raman spectra confirm the formation of small graphitic crystallites in size due to a finite-crystal-size effect. Springer-Verlag, 2007 Han J.C. Center for Composite Materials, Harbin Institute of Technology, Yikuang Street 2, Nangang District, Post-Box 3010, 150080, Harbin, P.R. China aut Liu A.P. Center for Composite Materials, Harbin Institute of Technology, Yikuang Street 2, Nangang District, Post-Box 3010, 150080, Harbin, P.R. China aut Zhu J.Q. Center for Composite Materials, Harbin Institute of Technology, Yikuang Street 2, Nangang District, Post-Box 3010, 150080, Harbin, P.R. China aut Tan M.L. Center for Composite Materials, Harbin Institute of Technology, Yikuang Street 2, Nangang District, Post-Box 3010, 150080, Harbin, P.R. China aut Wu H.P. Center for Composite Materials, Harbin Institute of Technology, Yikuang Street 2, Nangang District, Post-Box 3010, 150080, Harbin, P.R. China aut Applied Physics A Springer-Verlag 88/2(2007-08-01), 341-345 0947-8396 88:2<341 2007 88 339 https://doi.org/10.1007/s00339-007-3938-4 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00339-007-3938-4 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Han J.C. Center for Composite Materials, Harbin Institute of Technology, Yikuang Street 2, Nangang District, Post-Box 3010, 150080, Harbin, P.R. China aut NATIONALLICENCE 700 1- Liu A.P. Center for Composite Materials, Harbin Institute of Technology, Yikuang Street 2, Nangang District, Post-Box 3010, 150080, Harbin, P.R. China aut NATIONALLICENCE 700 1- Zhu J.Q. Center for Composite Materials, Harbin Institute of Technology, Yikuang Street 2, Nangang District, Post-Box 3010, 150080, Harbin, P.R. China aut NATIONALLICENCE 700 1- Tan M.L. Center for Composite Materials, Harbin Institute of Technology, Yikuang Street 2, Nangang District, Post-Box 3010, 150080, Harbin, P.R. China aut NATIONALLICENCE 700 1- Wu H.P. Center for Composite Materials, Harbin Institute of Technology, Yikuang Street 2, Nangang District, Post-Box 3010, 150080, Harbin, P.R. China aut NATIONALLICENCE 773 0- Applied Physics A Springer-Verlag 88/2(2007-08-01), 341-345 0947-8396 88:2<341 2007 88 339 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer