caa a22 4500 463212282 CHVBK 20180405153145.0 cr unu---uuuuu 170326e20071001xx s 000 0 eng 10.1007/s00339-007-4093-7 doi (NATIONALLICENCE)springer-10.1007/s00339-007-4093-7 Crystallinity and electrical properties of (Pb,Sr)TiO3 films enhanced by laser-assisted low-thermal-budget annealing [Elektronische Daten] [J.-L. Wang, Y.-S. Lai, B.-S. Chiou, C.-C. Chou, C.-C. Tsai, T.G.-Y. Lee, H.-C. Cheng] The physical and electrical properties of (Pb,Sr)TiO3 (PSrT) films annealed by various techniques are systematically investigated in this study. The crystallinity and ferroelectricity of PSrT films can be enhanced by excimer laser annealing (ELA), but the effect only works on the upper region of films. On the other hand, PSrT films treated by rapid thermal annealing (RTA) can also improve crystallinity and ferroelectricity. However, the leakage current of films is seriously increased due to defects and interfacial diffusion induced by post-RTA at high temperature. As a result, the laser-assisted two-step annealing (post-ELA+RTA) is proposed in this work. It is found that PSrT films treated by post-ELA+RTA show improved crystallinity, better ferroelectric properties, higher dielectric constant, and lower leakage currents, which bring out the longer lifetime and higher breakdown field. Springer-Verlag, 2007 Wang J.-L Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University, 1001 Ta Hsueh Rd., 30050, Hsinchu, Taiwan, R.O.C. aut Lai Y.-S Department of Materials Science and Engineering, National United University, 36003, Miaoli, Taiwan, R.O.C. aut Chiou B.-S Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University, 1001 Ta Hsueh Rd., 30050, Hsinchu, Taiwan, R.O.C. aut Chou C.-C Department of Mechanical Engineering, National Taiwan University of Science and Technology, 10607, Taipei, Taiwan, R.O.C. aut Tsai C.-C Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University, 1001 Ta Hsueh Rd., 30050, Hsinchu, Taiwan, R.O.C. aut Lee T.G.-Y Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University, 1001 Ta Hsueh Rd., 30050, Hsinchu, Taiwan, R.O.C. aut Cheng H.-C Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University, 1001 Ta Hsueh Rd., 30050, Hsinchu, Taiwan, R.O.C. aut Applied Physics A Springer-Verlag 89/1(2007-10-01), 213-219 0947-8396 89:1<213 2007 89 339 https://doi.org/10.1007/s00339-007-4093-7 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00339-007-4093-7 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Wang J.-L Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University, 1001 Ta Hsueh Rd., 30050, Hsinchu, Taiwan, R.O.C aut NATIONALLICENCE 700 1- Lai Y.-S Department of Materials Science and Engineering, National United University, 36003, Miaoli, Taiwan, R.O.C aut NATIONALLICENCE 700 1- Chiou B.-S Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University, 1001 Ta Hsueh Rd., 30050, Hsinchu, Taiwan, R.O.C aut NATIONALLICENCE 700 1- Chou C.-C Department of Mechanical Engineering, National Taiwan University of Science and Technology, 10607, Taipei, Taiwan, R.O.C aut NATIONALLICENCE 700 1- Tsai C.-C Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University, 1001 Ta Hsueh Rd., 30050, Hsinchu, Taiwan, R.O.C aut NATIONALLICENCE 700 1- Lee T.G.-Y Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University, 1001 Ta Hsueh Rd., 30050, Hsinchu, Taiwan, R.O.C aut NATIONALLICENCE 700 1- Cheng H.-C Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University, 1001 Ta Hsueh Rd., 30050, Hsinchu, Taiwan, R.O.C aut NATIONALLICENCE 773 0- Applied Physics A Springer-Verlag 89/1(2007-10-01), 213-219 0947-8396 89:1<213 2007 89 339 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer