caa a22 4500 463212428 CHVBK 20180405153145.0 cr unu---uuuuu 170326e20071001xx s 000 0 eng 10.1007/s00339-007-4190-7 doi (NATIONALLICENCE)springer-10.1007/s00339-007-4190-7 Acoustic laser cleaning of silicon surfaces [Elektronische Daten] [T. Geldhauser, F. Ziese, F. Merkt, A. Erbe, J. Boneberg, P. Leiderer] We investigate the detachment of small particles from silicon surfaces by means of acoustic waves generated by laser-induced plasma formation at the back side of the sample. It is demonstrated that sufficiently high acoustic intensities can be reached to detach particles in the submicron regime. In order to study this "acoustic laser cleaning” in more detail, we have developed an interference technique which allows one to determine the elongation and acceleration of the surface with high temporal resolution, the basis for an analysis of the nanomechanical detachment process, which takes place on a temporal scale of nanoseconds. We find that the velocity of the detaching particles is significantly higher than the maximum velocity of the substrate surface. This indicates that not only inertial forces, but also elastic deformations of the particles, resulting from the acoustic pulse, play an important role for the cleaning process. Springer-Verlag, 2007 Geldhauser T. Universität Konstanz, Universitätsstr. 10, 78457, Konstanz, Germany aut Ziese F. Universität Konstanz, Universitätsstr. 10, 78457, Konstanz, Germany aut Merkt F. Universität Konstanz, Universitätsstr. 10, 78457, Konstanz, Germany aut Erbe A. Universität Konstanz, Universitätsstr. 10, 78457, Konstanz, Germany aut Boneberg J. Universität Konstanz, Universitätsstr. 10, 78457, Konstanz, Germany aut Leiderer P. Universität Konstanz, Universitätsstr. 10, 78457, Konstanz, Germany aut Applied Physics A Springer-Verlag 89/1(2007-10-01), 109-113 0947-8396 89:1<109 2007 89 339 https://doi.org/10.1007/s00339-007-4190-7 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00339-007-4190-7 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Geldhauser T. Universität Konstanz, Universitätsstr. 10, 78457, Konstanz, Germany aut NATIONALLICENCE 700 1- Ziese F. Universität Konstanz, Universitätsstr. 10, 78457, Konstanz, Germany aut NATIONALLICENCE 700 1- Merkt F. Universität Konstanz, Universitätsstr. 10, 78457, Konstanz, Germany aut NATIONALLICENCE 700 1- Erbe A. Universität Konstanz, Universitätsstr. 10, 78457, Konstanz, Germany aut NATIONALLICENCE 700 1- Boneberg J. Universität Konstanz, Universitätsstr. 10, 78457, Konstanz, Germany aut NATIONALLICENCE 700 1- Leiderer P. Universität Konstanz, Universitätsstr. 10, 78457, Konstanz, Germany aut NATIONALLICENCE 773 0- Applied Physics A Springer-Verlag 89/1(2007-10-01), 109-113 0947-8396 89:1<109 2007 89 339 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer