caa a22 4500 463212436 CHVBK 20180405153145.0 cr unu---uuuuu 170326e20071001xx s 000 0 eng 10.1007/s00339-007-4195-2 doi (NATIONALLICENCE)springer-10.1007/s00339-007-4195-2 Stress-induced large-area lift-off of crystalline Si films [Elektronische Daten] [F. Dross, J. Robbelein, B. Vandevelde, E. Van Kerschaver, I. Gordon, G. Beaucarne, J. Poortmans] A new implantation-free lift-off process is presented. We deposit a layer with mismatched thermal expansion coefficient with respect to the substrate. Upon cooling, the differential contraction induces a large stress field which is released by the initiation and the propagation of a crack parallel to the surface. The principle is demonstrated on both single and multi-crystalline silicon. Films with an area of 25cm2 and a thickness of 30-50μm have been obtained. Some Si layers were further processed into solar cells. An energy conversion efficiency of 9.9% was reached on a 1cm2 sample. Springer-Verlag, 2007 Dross F. IMEC v.z.w., Kapeldreef 75, 3001, Leuven, Belgium aut Robbelein J. IMEC v.z.w., Kapeldreef 75, 3001, Leuven, Belgium aut Vandevelde B. IMEC v.z.w., Kapeldreef 75, 3001, Leuven, Belgium aut Van Kerschaver E. IMEC v.z.w., Kapeldreef 75, 3001, Leuven, Belgium aut Gordon I. IMEC v.z.w., Kapeldreef 75, 3001, Leuven, Belgium aut Beaucarne G. IMEC v.z.w., Kapeldreef 75, 3001, Leuven, Belgium aut Poortmans J. IMEC v.z.w., Kapeldreef 75, 3001, Leuven, Belgium aut Applied Physics A Springer-Verlag 89/1(2007-10-01), 149-152 0947-8396 89:1<149 2007 89 339 https://doi.org/10.1007/s00339-007-4195-2 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00339-007-4195-2 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Dross F. IMEC v.z.w., Kapeldreef 75, 3001, Leuven, Belgium aut NATIONALLICENCE 700 1- Robbelein J. IMEC v.z.w., Kapeldreef 75, 3001, Leuven, Belgium aut NATIONALLICENCE 700 1- Vandevelde B. IMEC v.z.w., Kapeldreef 75, 3001, Leuven, Belgium aut NATIONALLICENCE 700 1- Van Kerschaver E. IMEC v.z.w., Kapeldreef 75, 3001, Leuven, Belgium aut NATIONALLICENCE 700 1- Gordon I. IMEC v.z.w., Kapeldreef 75, 3001, Leuven, Belgium aut NATIONALLICENCE 700 1- Beaucarne G. IMEC v.z.w., Kapeldreef 75, 3001, Leuven, Belgium aut NATIONALLICENCE 700 1- Poortmans J. IMEC v.z.w., Kapeldreef 75, 3001, Leuven, Belgium aut NATIONALLICENCE 773 0- Applied Physics A Springer-Verlag 89/1(2007-10-01), 149-152 0947-8396 89:1<149 2007 89 339 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer