caa a22 4500 463212452 CHVBK 20180405153145.0 cr unu---uuuuu 170326e20071001xx s 000 0 eng 10.1007/s00339-007-4158-7 doi (NATIONALLICENCE)springer-10.1007/s00339-007-4158-7 Selective ablation of thin Mo and TCO films with femtosecond laser pulses for structuring thin film solar cells [Elektronische Daten] [S. Zoppel, H. Huber, G.A. Reider] We report on recent results on selective ablation of TCO (SnO2, ZnO) and metallic layers as a possible process for structuring thin film solar cells. The multipulse ablation thresholds determined for substrate and various thin films show a parameter window where the films can be completely removed by a single scan without at the same time damaging the underlying material. By employing ultrashort pulsed lasers, nonthermal ablation at repetition rates up to the megahertz regime enables high quality structuring combined with process speeds meeting industrial demands. Springer-Verlag, 2007 Zoppel S. Photonics Institute, Vienna University of Technology, Gusshausstrasse 27-29, 1040, Vienna, Austria aut Huber H. HighQLaser Production GmbH, Kaiser-Franz-Josef-Str. 61, 6845, Hohenems, Austria aut Reider G.A. Photonics Institute, Vienna University of Technology, Gusshausstrasse 27-29, 1040, Vienna, Austria aut Applied Physics A Springer-Verlag 89/1(2007-10-01), 161-163 0947-8396 89:1<161 2007 89 339 https://doi.org/10.1007/s00339-007-4158-7 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00339-007-4158-7 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Zoppel S. Photonics Institute, Vienna University of Technology, Gusshausstrasse 27-29, 1040, Vienna, Austria aut NATIONALLICENCE 700 1- Huber H. HighQLaser Production GmbH, Kaiser-Franz-Josef-Str. 61, 6845, Hohenems, Austria aut NATIONALLICENCE 700 1- Reider G.A. Photonics Institute, Vienna University of Technology, Gusshausstrasse 27-29, 1040, Vienna, Austria aut NATIONALLICENCE 773 0- Applied Physics A Springer-Verlag 89/1(2007-10-01), 161-163 0947-8396 89:1<161 2007 89 339 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer