caa a22 4500 463212525 CHVBK 20180405153145.0 cr unu---uuuuu 170326e20071001xx s 000 0 eng 10.1007/s00339-007-4058-x doi (NATIONALLICENCE)springer-10.1007/s00339-007-4058-x Optical, electrical, structural and microstructural characteristics of rf sputtered ITO films developed for art protection coatings [Elektronische Daten] [A. Krasilnikova Sytchkova, M.L. Grilli, S. Boycheva, A. Piegari] Transparent and conductive tin-doped indium oxide (ITO) films have been prepared by rf sputtering in an Ar and Ar+O2 gas mixture, both with and without additional substrate heating. The influence of both deposition conditions and post-annealing treatment on optical, electrical, structural and microstructural properties of the ITO films has been investigated. The optical constants have been calculated in the range 320-2500nm using a combination of several theoretical models. A schematic diagram for the film properties change versus composition has been proposed in terms of a generalized parameter characterising the energy efficiency of the film formation. The deposition conditions and the optical and electrical properties of the films have been optimized with respect to the requirements for their application in art protection coatings. Springer-Verlag, 2007 Krasilnikova Sytchkova A. Optical Coatings Group, ENEA Research Centre, via Anguillarese 301, 00123, Rome, Italy aut Grilli M.L. Optical Coatings Group, ENEA Research Centre, via Anguillarese 301, 00123, Rome, Italy aut Boycheva S. Optical Coatings Group, ENEA Research Centre, via Anguillarese 301, 00123, Rome, Italy aut Piegari A. Optical Coatings Group, ENEA Research Centre, via Anguillarese 301, 00123, Rome, Italy aut Applied Physics A Springer-Verlag 89/1(2007-10-01), 63-72 0947-8396 89:1<63 2007 89 339 https://doi.org/10.1007/s00339-007-4058-x text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00339-007-4058-x text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Krasilnikova Sytchkova A. Optical Coatings Group, ENEA Research Centre, via Anguillarese 301, 00123, Rome, Italy aut NATIONALLICENCE 700 1- Grilli M.L. Optical Coatings Group, ENEA Research Centre, via Anguillarese 301, 00123, Rome, Italy aut NATIONALLICENCE 700 1- Boycheva S. Optical Coatings Group, ENEA Research Centre, via Anguillarese 301, 00123, Rome, Italy aut NATIONALLICENCE 700 1- Piegari A. Optical Coatings Group, ENEA Research Centre, via Anguillarese 301, 00123, Rome, Italy aut NATIONALLICENCE 773 0- Applied Physics A Springer-Verlag 89/1(2007-10-01), 63-72 0947-8396 89:1<63 2007 89 339 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer