caa a22 4500 463212894 CHVBK 20180405153147.0 cr unu---uuuuu 170326e20071101xx s 000 0 eng 10.1007/s00339-007-4248-6 doi (NATIONALLICENCE)springer-10.1007/s00339-007-4248-6 NH3-assisted growth approach for ZnO films by atmospheric pressure metal-organic chemical vapor deposition [Elektronische Daten] [Jiangnan Dai, Fengyi Jiang, Yong Pu, Li Wang, Wenqing Fang, Fan Li] In this paper, we investigated the two effects of a little H2 and NH3 gas on the properties of ZnO films grown by atmospheric pressure metal organic chemical vapor deposition (AP-MOCVD) using deionized water (H2O) and diethylzinc (DEZn) as the O and Zn sources, respectively. Experimental results showed that compared to the effect of a little H2, it could more effectively improve the surface morphology, crystalline structure, and optical quality of ZnO epilayers by adding a little NH3 gas into the growth ambient. Furthermore, by adding a little NH3 gas into the growth ambient, the hydrogen-related D0X1 (I4):3.365eV peak disappeared in 10K photoluminescence spectrum of ZnO films, which indicated the elimination of the unintended hydrogen impurity. The result of the Huang-Rhys factor S (0.113) showed that it was effective for reducing the probability of exciton-phonon scattering of ZnO films by adding a little NH3 gas into the growth ambient. The electron mobility of ZnO films were also significantly improved by this method with the mobility of 100cm2V-1s-1 measured by Hall measurement at room temperature. Springer-Verlag, 2007 Dai Jiangnan Education Ministry Engineering Research Center for Luminescence Materials and Devices, Nanchang University, 235 East Nanjing Road, Nanchang, 330047, Jiangxi, P.R. China aut Jiang Fengyi Education Ministry Engineering Research Center for Luminescence Materials and Devices, Nanchang University, 235 East Nanjing Road, Nanchang, 330047, Jiangxi, P.R. China aut Pu Yong Education Ministry Engineering Research Center for Luminescence Materials and Devices, Nanchang University, 235 East Nanjing Road, Nanchang, 330047, Jiangxi, P.R. China aut Wang Li Education Ministry Engineering Research Center for Luminescence Materials and Devices, Nanchang University, 235 East Nanjing Road, Nanchang, 330047, Jiangxi, P.R. China aut Fang Wenqing Education Ministry Engineering Research Center for Luminescence Materials and Devices, Nanchang University, 235 East Nanjing Road, Nanchang, 330047, Jiangxi, P.R. China aut Li Fan Education Ministry Engineering Research Center for Luminescence Materials and Devices, Nanchang University, 235 East Nanjing Road, Nanchang, 330047, Jiangxi, P.R. China aut Applied Physics A Springer-Verlag 89/3(2007-11-01), 645-650 0947-8396 89:3<645 2007 89 339 https://doi.org/10.1007/s00339-007-4248-6 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00339-007-4248-6 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Dai Jiangnan Education Ministry Engineering Research Center for Luminescence Materials and Devices, Nanchang University, 235 East Nanjing Road, Nanchang, 330047, Jiangxi, P.R. China aut NATIONALLICENCE 700 1- Jiang Fengyi Education Ministry Engineering Research Center for Luminescence Materials and Devices, Nanchang University, 235 East Nanjing Road, Nanchang, 330047, Jiangxi, P.R. China aut NATIONALLICENCE 700 1- Pu Yong Education Ministry Engineering Research Center for Luminescence Materials and Devices, Nanchang University, 235 East Nanjing Road, Nanchang, 330047, Jiangxi, P.R. China aut NATIONALLICENCE 700 1- Wang Li Education Ministry Engineering Research Center for Luminescence Materials and Devices, Nanchang University, 235 East Nanjing Road, Nanchang, 330047, Jiangxi, P.R. China aut NATIONALLICENCE 700 1- Fang Wenqing Education Ministry Engineering Research Center for Luminescence Materials and Devices, Nanchang University, 235 East Nanjing Road, Nanchang, 330047, Jiangxi, P.R. China aut NATIONALLICENCE 700 1- Li Fan Education Ministry Engineering Research Center for Luminescence Materials and Devices, Nanchang University, 235 East Nanjing Road, Nanchang, 330047, Jiangxi, P.R. China aut NATIONALLICENCE 773 0- Applied Physics A Springer-Verlag 89/3(2007-11-01), 645-650 0947-8396 89:3<645 2007 89 339 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer