caa a22 4500 463213092 CHVBK 20180405153147.0 cr unu---uuuuu 170326e20071201xx s 000 0 eng 10.1007/s00339-007-4273-5 doi (NATIONALLICENCE)springer-10.1007/s00339-007-4273-5 Three-dimensional integration of microoptical components buried inside photosensitive glass by femtosecond laser direct writing [Elektronische Daten] [Zhongke Wang, Koji Sugioka, Katsumi Midorikawa] We report the three-dimensional (3D) integration of microoptical components such as microlenses, micromirrors and optical waveguides in a single glass chip by femtosecond (fs) laser direct writing. First, two types of microoptical lenses were fabricated inside photosensitive Foturan glass by forming hollow microstructures using fs laser direct writing followed by thermal treatment, successive wet etching and additional annealing. One type of lens is the cylindrical microlens with a curvature radius R of 1.0mm, and the other is the plano-convex microlens with radius R of 0.75mm. Subsequently, by the continuous procedure of hollow microstructure fabrication, a micromirror was integrated with the plano-convex microlens in the single glass chip. Further integration of waveguides was performed by internal refractive index modification using fs laser direct writing after the hollow structure fabrication of the microlens and the micromirror. A demonstration of the laser beam transmission in the integrated optical microdevice shows that the 3D integration of waveguides with a micromirror and a microoptical lens in a single glass chip is highly effective for light beam guiding and focusing. Springer-Verlag, 2007 Wang Zhongke Laser Technology Laboratory, RIKEN - The Institute of Physical and Chemical Research, Hirosawa 2-1, Wako, 351-0198, Saitama, Japan aut Sugioka Koji Laser Technology Laboratory, RIKEN - The Institute of Physical and Chemical Research, Hirosawa 2-1, Wako, 351-0198, Saitama, Japan aut Midorikawa Katsumi Laser Technology Laboratory, RIKEN - The Institute of Physical and Chemical Research, Hirosawa 2-1, Wako, 351-0198, Saitama, Japan aut Applied Physics A Springer-Verlag 89/4(2007-12-01), 951-955 0947-8396 89:4<951 2007 89 339 https://doi.org/10.1007/s00339-007-4273-5 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00339-007-4273-5 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Wang Zhongke Laser Technology Laboratory, RIKEN - The Institute of Physical and Chemical Research, Hirosawa 2-1, Wako, 351-0198, Saitama, Japan aut NATIONALLICENCE 700 1- Sugioka Koji Laser Technology Laboratory, RIKEN - The Institute of Physical and Chemical Research, Hirosawa 2-1, Wako, 351-0198, Saitama, Japan aut NATIONALLICENCE 700 1- Midorikawa Katsumi Laser Technology Laboratory, RIKEN - The Institute of Physical and Chemical Research, Hirosawa 2-1, Wako, 351-0198, Saitama, Japan aut NATIONALLICENCE 773 0- Applied Physics A Springer-Verlag 89/4(2007-12-01), 951-955 0947-8396 89:4<951 2007 89 339 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer